Stitching interferometry for synchrotron mirror metrology at National Synchrotron Light Source II (NSLS-II)

Huang, Lei; Wang, Tianyi; Tayabaly, Kashmira; Kuhne, Dennis; Xu, Weihe; Xu, Wei; Vescovi, Matthew; Idir, Mourad

doi:10.1016/j.optlaseng.2019.105795

Cited by 33 publications

(13 citation statements)

References 17 publications

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“…11(b) and 11(c), the 2D slope data were generated from the height measurement using a 2.5 mm Â 2.5 mm sliding window in the experiment. We found that this method excellently matches the 2.5 mm pinhole used in our NSLS-II NSP system (Huang, Wang, Tayabaly et al, 2020). This will be further manifested in the final inspection cross-validated between our SI and NSP systems in Section 5.4.…”

Section: Methodssupporting

confidence: 64%

“…x) dimension (100 mm to 1 m) than its sagittal (i.e. y) dimension (5 to 20 mm), stitching interferometry (SI) techniques (Mimura et al, 2005;Yumoto et al, 2016;Vivo et al, 2016;Huang et al, 2019;Huang, Wang, Tayabaly et al, 2020) have been developed to extend the field of view. The main idea is to combine the measurements in individual small fields of view to generate a height map of the entire clear aperture (CA) on the mirror surface.…”

Section: Introductionmentioning

confidence: 99%

“…The main idea is to combine the measurements in individual small fields of view to generate a height map of the entire clear aperture (CA) on the mirror surface. The measurement repeatability can reach <0.5 nm RMS for flat and 'shallow' curved mirrors (Huang et al, 2019;Huang, Wang, Tayabaly et al, 2020). Microscopebased SI techniques (Yamauchi et al, 2003;Rommeveaux & Barrett, 2010) have also been attempted to inspect middle-to high-frequency errors.…”

Section: Introductionmentioning

confidence: 99%

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Hybrid height and slope figuring method for grazing-incidence reflective optics

Wang¹,

Huang²,

Ke³

et al. 2023

J Synchrotron Rad

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Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas.

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Section: Methodssupporting

confidence: 64%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Hybrid height and slope figuring method for grazing-incidence reflective optics

Wang¹,

Huang²,

Ke³

et al. 2023

J Synchrotron Rad

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“…Based on the Fourier transform-based algorithm, we proposed a Robust Iterative Fourier Transform-based dwell time Algorithm (RIFTA) 9 that fulfills all the three characteristics of dwell time mentioned above while maintains FFT's high computational efficiency. First, the Nelder-Mead algorithm 39 was employed to directly search the optimal threshold γ for the thresholded inverse filtering. Second, a two-level iterative scheme was proposed to guarantee the non-negativity of the dwell time with the minimal increase in the total dwell time.…”

Section: Robust Iterative Fourier Transform-based Dwell Time Algorithm For Ccosmentioning

confidence: 99%

Advances in optical engineering for future telescopes

Kim¹,

Choi²,

Brendel³

et al. 2021

OEA

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Significant optical engineering advances at the University of Arizona are being made for design, fabrication, and construction of next generation astronomical telescopes. This summary review paper focuses on the technological advances in three key areas. First is the optical fabrication technique used for constructing next-generation telescope mirrors. Advances in ground-based telescope control and instrumentation comprise the second area of development. This includes active alignment of the laser truss-based Large Binocular Telescope (LBT) prime focus camera, the new MOBI-US modular cross-dispersion spectroscopy unit used at the prime focal plane of the LBT, and topological pupil segment optimization. Lastly, future space telescope concepts and enabling technologies are discussed. Among these, the Nautilus space observatory requires challenging alignment of segmented multi-order diffractive elements. The OASIS terahertz space telescope presents unique challenges for characterizing the inflatable primary mirror, and the Hyperion space telescope pushes the limits of high spectral resolution, far-UV spectroscopy. The Coronagraphic Debris and Exoplanet Exploring Pioneer (CDEEP) is a Small Satellite (SmallSat) mission concept for high-contrast imaging of circumstellar disks and exoplanets using vector vortex coronagraph. These advances in optical engineering technologies will help mankind to probe, explore, and understand the scientific beauty of our universe.

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“…In addition, the cost of acquisition and setup can be high for such a large system. On the other hand, the stitching interferometry technique has long been used to evaluate the Z-directional surface form error of the large size optical components [23][24][25][26]. Nevertheless, the stitching calibration of X-directional pitch deviation of large size scale grating has not been conducted yet.…”

Section: Introductionmentioning

confidence: 99%

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

Xiong

Shimizu

Matsukuma

et al. 2021

Sensors

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An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the X-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures’ measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the X-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the X-directional pitch deviation of the linear scale over its whole area.

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Stitching interferometry for synchrotron mirror metrology at National Synchrotron Light Source II (NSLS-II)

Cited by 33 publications

References 17 publications

Hybrid height and slope figuring method for grazing-incidence reflective optics

Hybrid height and slope figuring method for grazing-incidence reflective optics

Advances in optical engineering for future telescopes

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

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