Stitching test of large flats by using two orthogonally arranged wavefront interferometers

Chen, Shanyong; Wu, Chuanchao; Tie, Guipeng; Zhai, Dede

doi:10.1364/ao.56.009193

Cited by 8 publications

(3 citation statements)

References 13 publications

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“…Figure 1 shows the schematic of the concept of stitching interferometry, which indicates that the stitching technique can enable the measurement of the large size optical component by using a "small size" interferometer. The final result is obtained by taking multiple overlapping images of the large component, and numerically "stitching" these sub-apertures together by computing a correcting "Tip-Tilt-Piston" correction for each sub-aperture [27,31]. In addition, for some special applications such as stitching the optical component with a large convex aspheric surface or a high numerical aperture cylindrical optics, other additional corrections except the "Tip-Tilt-Piston" can also be conducted in the stitching process by using a well-designed algorithm [32,33].…”

Section: Principle 21 Basic Principle Of Z-directional Surface Form Stitching Interferometrymentioning

confidence: 99%

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

Xiong

Shimizu

Matsukuma

et al. 2021

Sensors

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An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the X-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures’ measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the X-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the X-directional pitch deviation of the linear scale over its whole area.

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Section: Principle 21 Basic Principle Of Z-directional Surface Form Stitching Interferometrymentioning

confidence: 99%

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

Xiong

Shimizu

Matsukuma

et al. 2021

Sensors

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“…In addition, the angular motion during subaperture scan should be measured simultaneously rather than determined by stitching optimization, which will induce the accumulation effect of the second order reference surface error. [ 219 ] A very good implementation is the relative angle determinable stitching interferometry (RADSI) proposed at Osaka University. [ 220,221 ] Two versions including the microtopography interferometer and the wavefront interferometer were developed with nanometer accuracy but not commercialized yet.…”

Section: Single‐point‐probe‐based Profilometrymentioning

confidence: 99%

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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Freeform optical surfaces are advantageous to optical designers, as they provide additional degrees of freedom for optimization. The loss of rotational symmetry, however, makes measurement of freeforms more challenging. Herein, advances in interferometric areal measurement of freeform optical surfaces, including null tests, non-null tests, near-null tests, and adaptive null tests, are reviewed. Some new developments, in the Hartmann test, deflectometry, and phase retrieval, as representatives of non-interferometric areal measurement, are then presented. Overall, the focus is on single-point-probe-based profilometry categorized into coordinate measurements and slope-or curvature-based measurements. Innovative measurement technology is trying to bridge the gap between high accuracy and high dynamic range as freeform optical surfaces are finding more applications in visible and shorter-wavelength optics.

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“…Vision-based inspection 1 – 4 is broadly applied in the fields of the mechanical part manufacture 5 , 6 , the dimension measurement 7 , 8 , the diagnostic equipment 9 – 11 and Fourier profilometry 12 – 14 , etc. The crack on the pavement is one of the most important inspection objects in the vision-based inspection.…”

Section: Introductionmentioning

confidence: 99%

Active solution of homography for pavement crack recovery with four laser lines

Chen

et al. 2018

Sci Rep

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An active solution method of the homography, which is derived from four laser lines, is proposed to recover the pavement cracks captured by the camera to the real-dimension cracks in the pavement plane. The measurement system, including a camera and four laser projectors, captures the projection laser points on the 2D reference in different positions. The projection laser points are reconstructed in the camera coordinate system. Then, the laser lines are initialized and optimized by the projection laser points. Moreover, the plane-indicated Plücker matrices of the optimized laser lines are employed to model the laser projection points of the laser lines on the pavement. The image-pavement homography is actively determined by the solutions of the perpendicular feet of the projection laser points. The pavement cracks are recovered by the active solution of homography in the experiments. The recovery accuracy of the active solution method is verified by the 2D dimension-known reference. The test case with the measurement distance of 700 mm and the relative angle of 8° achieves the smallest recovery error of 0.78 mm in the experimental investigations, which indicates the application potentials in the vision-based pavement inspection.

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Stitching test of large flats by using two orthogonally arranged wavefront interferometers

Cited by 8 publications

References 13 publications

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Active solution of homography for pavement crack recovery with four laser lines

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