2021
DOI: 10.1088/1361-6528/abd2ea
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Stochastic models of systems for Nanotechnology: from micro to macro scale

Abstract: Computer modeling technique based on the theory of stochastic processes have been used in order to provide a realistic simulation of the behavior of nanoscopic systems, related in particular to plasma reactors in microelectronic device production. Basing on decades of experience, we show here, with new results, that the universality of such methods allows the development of codes with the highest reusability and versatility, crossing the barrier of scale. At the smallest scale, the quantum calculation of the p… Show more

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Cited by 3 publications
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