2015
DOI: 10.1109/jmems.2014.2341590
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Stochastic Resonance in a Voltage-Controlled Micromechanical Slider

Abstract: Stochastic resonance (SR) is a phenomenon that has been extensively investigated theoretically, but which is much harder to study experimentally. In this paper, we report on an experimental micromechanical slider structure that allows for full control of most of the parameters that are of importance for the occurrence of SR. Using a silicon-on-insulator-based process, we realized a slider structure with periodic capacitive structures to obtain tunable unstable regions. We implemented stochastic resonance by co… Show more

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Cited by 6 publications
(7 citation statements)
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“…To design and optimize these MEMS devices, one should firstly understand in detail the statics/dynamics that may exist in the system [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. Then, combined with the mechanical principles previously derived and the real demands of MEMS communities, one can summarize some design rules that may finally offer help in reducing the production period and cost for new MEMS devices.…”
Section: Introductionmentioning
confidence: 99%
“…To design and optimize these MEMS devices, one should firstly understand in detail the statics/dynamics that may exist in the system [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. Then, combined with the mechanical principles previously derived and the real demands of MEMS communities, one can summarize some design rules that may finally offer help in reducing the production period and cost for new MEMS devices.…”
Section: Introductionmentioning
confidence: 99%
“…Instrumentation: Acoustic actuation test-bed was powered with a programmable signal generator (33510B, Keysight, Inc., USA) connected to a 160 V custom-built voltage amplifier (ESyLAB LM3325 8-channel [36] ) used for acoustic power enhancement. Magnetic actuation was enabled by a set of two orthogonal electromagnets powered by XenusPlus EtherCAT drivers (XE-2-230-20, Copley Controls, USA), providing up to 5 mT of magnetic field.…”
Section: Methodsmentioning
confidence: 99%
“…Stochastic resonance (SR) establishes a phenomenon where the additive noise can enhance the performance of some certain nonlinear systems [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. Benzi initially observed the SR effect in climate model several decades ago [1].…”
Section: Introductionmentioning
confidence: 99%