“…15,38 On the other hand, Teflon and SiO2 are insulators with a similar dielectric constant to SU8, but they also have the advantage over SU8 of having superior chemical stability. In addition, both materials are well-suited for suspending BLMs, as exemplified by the folding method for Teflon 19,34,39 and the tip-dip method for SiO2 (glass). 40,41 Here, insulator layers of Teflon and SiO2 (thermal oxide) have been coated on the surface of the Si chip and background noise currents of BLMs prepared in the Si chips were examined.…”