“…In the present investigation, two diagnostic tools are employed for beam characterization, an EUV sensitive CCD camera and a Hartmann type wavefront sensor [140,113]: • The Hartmann sensor is a combination of a back-thinned CCD chip (Princeton Instruments PI-MTE: 1300B, 1340 × 1300 square pixels, edge length 20 µm, dynamic range 16 bit) with a pinhole array in a distance of 95 mm to the chip (pinhole diameter 75 µm, pinhole pitch 250 µm). The device is placed 420 mm behind the expected focal position of the HHG beam.…”