Straight movement of micro containers based on ratchet mechanisms and electrostatic comb-drive actuators

Pham, Phuc Hong; Dao, Dzung Viet; Amaya, Satoshi; Kitada, Ryoji; Saito, Susumu

doi:10.1088/0960-1317/16/12/003

Cited by 21 publications

(18 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Several MEMS devices with transportation capability have been designed and fabricated (Desai et al 1999;Pham et al 2006), however, they were not intended for in vivo use and thus an actuator was not built into the devices, the transportation being achieved through periodical movement of a rail or surrounding electrical potential. Thus, the design of a new device with a built-in actuator that can work in wet and ionic conditions is required for in vivo use, but the design of such a device is challenging due to the difficulty in making a small but powerful actuator that can work in wet and ionic environments.…”

Section: Introductionmentioning

confidence: 99%

Designing of a Si-MEMS device with an integrated skeletal muscle cell-based bio-actuator

Fujita

Dau

Shimizu

et al. 2010

Biomed Microdevices

Self Cite

View full text Add to dashboard Cite

With the aim of designing a mechanical drug delivery system involving a bio-actuator, we fabricated a Micro Electro Mechanical Systems (MEMS) device that can be driven through contraction of skeletal muscle cells. The device is composed of a Si-MEMS with springs and ratchets, UV-crosslinked collagen film for cell attachment, and C2C12 muscle cells. The Si-MEMS device is 600 μm x 1000 μm in size and the width of the collagen film is 250 ~ 350 μm, which may allow the device to go through small blood vessels. To position the collagen film on the MEMS device, a thermo-sensitive polymer was used as the sacrifice-layer which was selectively removed with O₂ plasma at the positions where the collagen film was glued. The C2C12 myoblasts were seeded on the collagen film, where they proliferated and formed myotubes after induction of differentiation. When C2C12 myotubes were stimulated with electric pulses, contraction of the collagen film-C2C12 myotube complex was observed. When the edge of the Si-MEMS device was observed, displacement of ~8 μm was observed, demonstrating the possibility of locomotive movement when the device is placed on a track of adequate width. Here, we propose that the C2C12-collagen film complex is a new generation actuator for MEMS devices that utilize glucose as fuel, which will be useful in environments in which glucose is abundant such as inside a blood vessel.

show abstract

Section: Introductionmentioning

confidence: 99%

Designing of a Si-MEMS device with an integrated skeletal muscle cell-based bio-actuator

Fujita

Dau

Shimizu

et al. 2010

Biomed Microdevices

Self Cite

View full text Add to dashboard Cite

show abstract

“…The backward movement of the micro container is locked due to the ratchet teeth arrangement. In comparison with the previous micro system (Pham et al 2006), this transmission system has two main improvements. The first one is higher stability of the movement of the container, which is achieved by using four springs instead of two springs in the previous design of the container.…”

Section: Introductionmentioning

confidence: 91%

“…are used to create reciprocating movement in directcontact micro systems (Chien-Tai and Hsu 2006;Ebefors et al 2000;Suh et al 1997). Pham et al (2006Pham et al ( , 2007Pham et al ( , 2010 designed systems, in which the ratchet mechanisms, elastic micro structures were combined with electrostatic combdrive actuators to create unidirectional movement of a micro container. To linearly drive the container, the authors used a classic type of ECAs with planar electrodes.…”

Section: Introductionmentioning

confidence: 99%

A micro transmission system based on combination of micro elastic structures and ratchet mechanism

2015

Self Cite

View full text Add to dashboard Cite

movement in micro/meso systems. However, under the influence of the size-effect, new approaches are required to design and fabricate such systems. In (Shibaike 1995), Shibaike presented a way to design micro-mechanisms, in which he focused on three design factors, i.e. device configuration, materials and fabrication processes. Dario et al. in (1992) gave a clear definition about the micromechanisms, micro-machines and micro-robots, as well as a general classification of the micro actuators used in those micro systems. Using surface-micromachining technology, Mehregany and Tai (1991) successfully fabricated some traditional mechanisms such as micro linkages, micro gear trains and micro motors. Fabricated with the same technology, the torsional ratcheting actuating systems (TRA) (Barnes et al 2000; Tanner 2001; Sacks and Barnes 2001) used the ratchet mechanism and elastic micro structures in order to generate rotational motion from the reciprocating motion of the electrostatic combdrive actuators (ECAs). Because of the fact that those micro systems were fabricated by the surface-micromachining technology and have complex multi-layer structure, they also have some disadvantages such as complicated fabrication process and limited power transmission ability. With the same goal of design gearing micro-mechanisms, Phuc and Dzung (2013) chose silicon on insulator-MEMS (SOI-MEMS) technology instead of surface process in those gear trains designed by Polosky et al. (1998);Rogers (1998) and Sniegowski and Garcia (1996). Kim et al. in (2005) also applied the bulk-micromachining technology on a SOI wafer to fabricate an inchworm motor, in which electrostatic micro actuators and silicon spring structures were used to create high-resolution movement of the shuttle. In those micro systems, elastic structures such as beams, springs etc. are indispensable components.Abstract This paper presents a design, fabrication and performance of a silicon micro transmission system based on the micro electro-mechanical system technology. The system consists of six electrostatic shaking motors. With elastic structures and two ratchet mechanisms on both sides, the micro container (450 µm in length and 220 µm in width) can be driven forward with different velocities. The kinematic and force analyses of the system were performed in order to find out the moving condition of the container. The velocity of the micro container was tested with the driving frequencies up to 40 Hz at the driving voltage of V pp = 120 V and the obtained maximum displacement was about 2.2 mm. The micro transmission system with the cover size of 5 × 5 mm 2 can be applied in bioengineering for carrying and classifying micro/nano samples, etc.

show abstract

“…In the MEMS field, there have been many micro conveyance systems reported, such as, a 2D conveyance system based on ciliary motion, in which objects were elevated and moved by ciliary type thermal actuators array (Ebefors et al 2000), a XY-plane conveyance system based on surface acoustic wave in piezoelectric substrate (Shigematsu and Kurosawa 2004), an inchworm motors with bidirectional XY electrostatic actuators (Yeh et al 2002), or a parallel micro conveyer system using electrostatic comb-drive actuators (Pham et al 2006).…”

Section: Introductionmentioning

confidence: 99%

Micro robot system with moving micro-car driven by electrostatic comb-drive actuators

Pham

2010

Microsyst Technol

Self Cite

View full text Add to dashboard Cite

This paper describes a silicon micro robot system (MRS) that is capable of driving micro-cars in different directions based on a ratchet mechanism and electrostatic comb-drive actuators. Lateral movement of the ratchet racks makes the micro-car move in the perpendicular direction with different velocities. Based on MEMS technology, the MRS described in this article was fabricated from a silicon on insulator wafer by using only one photo mask. In our experiments, various driving frequencies ranging from 1 to 20 Hz were used to accelerate the microcar up to 200 lm/s. It was observed that the velocity of the micro-car was proportional to the driving frequency used in the experiments. This relation was also confirmed with our theoretical calculation. When combined with microscopes, this MRS can be applied in bio-medical analysis for transportation and classification of small samples.

show abstract

Straight movement of micro containers based on ratchet mechanisms and electrostatic comb-drive actuators

Cited by 21 publications

References 14 publications

Designing of a Si-MEMS device with an integrated skeletal muscle cell-based bio-actuator

Designing of a Si-MEMS device with an integrated skeletal muscle cell-based bio-actuator

A micro transmission system based on combination of micro elastic structures and ratchet mechanism

Micro robot system with moving micro-car driven by electrostatic comb-drive actuators

Contact Info

Product

Resources

About