The precise knowledge of the atomic order in monocrystalline alloys is fundamental to understand and predict their physical properties. With this perspective, we utilized laser-assisted atom probe tomography to investigate the three-dimensional distribution of atoms in nonequilibrium epitaxial Sn-rich group IV SiGeSn ternary semiconductors. Different atom probe statistical analysis tools including frequency distribution analysis, partial radial distribution functions, and nearest neighbor analysis were employed in order to evaluate and compare the behavior of the three elements to their spatial distributions in an ideal solid solution. This atomistic-level analysis provided clear evidence of an unexpected repulsive interaction between Sn and Si leading to the deviation of Si atoms from the theoretical random distribution. This departure from an ideal solid solution is supported by first principles calculations and attributed to the tendency of the system to reduce its mixing enthalpy throughout the layer-by-layer growth process.
2The assumption that the arrangement of atoms within the crystal lattice is perfectly random is a broadly used approximation to establish the physical properties of semiconductor alloys. This approximation allows one to estimate rather accurately certain thermodynamic as well as material parameters like the excess enthalpy of formation, Vegard-like lattice parameters, and band gaps that are smaller than the composition weighted average (optical bowing). However, it has been proposed that some ternary semiconductors can deviate from this assumed perfect solid solution. Indeed, both calculations and experiments suggested the presence of local atomic order in certain III-V alloys [1][2][3][4][5][6][7][8]. This phenomenon manifests itself when at least one of the elements forming the alloy preferentially occupies or avoids specific lattice sites. This induces short-range order in the lattice with an impact on the basic properties of the alloyed semiconductors [3][4][5][6][7].The recent progress in developing Sn-rich group IV (SiGeSn) ternary semiconductors and their integration in a variety of low dimensional systems and devices have revived the interest in elucidating the atomistic-level properties of monocrystalline alloys [9][10][11][12][13][14][15][16][17][18][19][20]. Interestingly, unlike
III-V semiconductors, achieving a direct bandgap in Si GeSn requires a sizable incorporation of Sn 10 . % , which is significantly higher than the equilibrium solubility (<1 at.%). Understanding the atomic structure of these metastable alloys is therefore imperative for implementing predictive models to describe their basic properties. With this perspective, we present a first study of the atomic order in Si Ge Sn alloys (x and y in 0.04 0.19 and 0.02 0.12 range, respectively). We employed Atom Probe Tomography (APT) which allows atomistic level investigations [21][22][23][24] and statistical tools to analyze the three-dimensional (3-D)distributions of the three elements. This analysis unraveled an un...