Strain-based multimode integrating sensing for a bridge-type compliant amplifier

Chen, Zhong; Li, Zhipeng; Jiang, Xiaomeng; Zhang, Xianmin

doi:10.1088/1361-6501/ab1984

Cited by 4 publications

(2 citation statements)

References 35 publications

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“…Compound BAM is widely used. Chen et al [132] studied the multimode sensing approach of the compound BAM that is integrated with strain gauges. Wu [133]- [136] designed a compact vertical piezo-actuator and XY parallel nanopositioning stage based on the compound BAM that significantly increases the directionality of the output motion.…”

Section: A Enhancement Of the Bam's Lateral Stiffnessmentioning

confidence: 99%

A Review on the Flexure-Based Displacement Amplification Mechanisms

et al. 2020

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Multifarious flexure-based displacement amplifiers have been proposed and studied in the past decades, showing importance in many industrial fields, such as bioengineering, optical instruments, and semiconductor technology. Displacement amplifiers provide precise motion and large stroke through a simple and low-cost way compared with other piezoelectric actuators. Those merits have opened a door for new and advanced micro devices with unprecedented performance. This paper aims to proffer a comprehensive review on the design, modeling, characteristics, and applications of flexure-based displacement amplifiers, following by pointing out the inherent drawbacks in this research area such as amplification ratio limit, parasitic motion, low lateral stiffness, low natural frequency, and discussing existing solutions and some potential research directions in those topics. Finally, a summary is concluded and the future development perspectives of the displacement amplifiers are discussed. This review contributes to giving a comprehensive understanding of the displacement amplifier, which provides guidance on designing new displacement amplifiers for improving their mechanical output performance. It is also expected to be instrumental for related researchers to understand displacement amplifiers, and to successfully select and design for specific applications.

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Section: A Enhancement Of the Bam's Lateral Stiffnessmentioning

confidence: 99%

A Review on the Flexure-Based Displacement Amplification Mechanisms

et al. 2020

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“…When the jaw gap is determined, a large gripping stroke can improve the clamp's adaptability to grasp the targets of different sizes. To obtain a large gripping stroke, researchers have applied different types of compliant amplification mechanisms to design micromanipulators, such as lever mechanisms and bridge mechanisms [7][8][9]. In addition, high natural frequency is another goal to be pursued by the microgripper.…”

Section: Introductionmentioning

confidence: 99%

Design and Testing of a New Piezoelectric-Actuated Symmetric Compliant Microgripper

Lyu

2022

Actuators

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Precise and stable operations in micromanipulation and microassembly require a high-performance microgripper. To improve the predominant static and dynamic characteristics, a novel piezoelectric-actuated compliant microgripper is designed, analyzed, and tested in this paper. The microgripper realizes a large gripping stroke by integrating a compliant bridge mechanism, an L-shaped mechanism, and a levered parallelogram mechanism. Optimization technology based on response surface analysis is applied to demonstrate the influence of structural parameters on the microgripper performance. Simulation results of finite element analysis reveal the superior performance of the designed microgripper in terms of gripping displacement, mechanism stiffness, equivalent stress, and natural frequency. A gripper prototype has been fabricated, and experimental studies have been conducted to test the microgripper’s physical properties. Experimental results show that the microgripper can grasp micro-objects with a maximum jaw motion stroke of 312.8 μm, natural frequency of 786 Hz, motion resolution of ±0.6 μm, and force resolution of ±1.69 mN. The gripping tests of an optical fiber with a diameter of 200 μm and a metal sheet with a thickness of 100 μm have been performed to demonstrate its gripping capability with position and force control.

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Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey

Huang,

Wang,

Meng

et al. 2024

Int. J. Extrem. Manuf.

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High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast dynamics, high stiffness and nanometer resolution. However, the nonlinear actuation, mechanical vibrational dynamics and multi-axis cross-coupling effect of high-bandwidth NPSs bring severe challenges for their design, modeling and control. Therefore, various state-of-the-art works have been reported over the past decades to deal with these challenges. This article provides a comprehensive review of high-bandwidth NPSs, which covers four representative aspects including mechanical design, system modeling, parameters optimization and high-bandwidth motion control. Besides, the representative high-bandwidth NPSs applied to the atomic force microscope and fast tool servo are presented and highlighted. Through the complete design procedure of high-bandwidth NPSs, this review aims at offering a systemic solution based on current research improvements for achieving the high-speed, high-accuracy and high-resolution operation. Furthermore, the remaining difficulties as well as the potential developments are summarized and discussed.

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Strain-based multimode integrating sensing for a bridge-type compliant amplifier

Cited by 4 publications

References 35 publications

A Review on the Flexure-Based Displacement Amplification Mechanisms

A Review on the Flexure-Based Displacement Amplification Mechanisms

Design and Testing of a New Piezoelectric-Actuated Symmetric Compliant Microgripper

Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey

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