Self-assembled
quantum dots (QDs) offer versatile sources of quantum
light for photonic quantum technologies thanks to their atomic-like
discrete energy levels for deterministic generation of single photons.
Though, the unavoidable inhomogeneous broadening and the ubiquitous
presence of the fine structure splitting (FSS) of the exciton states
hamper their use as high-fidelity entangled-photon sources (EPSs)
with well-defined energies, core elements in scalable networking quantum
applications. To overcome these challenges, in this work, we propose
and demonstrate a photolithographically fabricated microelectromechanical
system (MEMS) to dynamically control the optical properties of QDs.
The device features two orthogonal and independent uniaxial stresses
that can tune the exciton energy and the FSS simultaneously, enabling
demonstration of energy-tunable EPSs based on self-assembled QDs.
The device can be processed by only employing standard photolithography
techniques, which alleviates the use of sophisticated device design
and fabrications, thus providing a viable route toward the realization
of entanglement swapping with all-solid-state quantum emitters.