Germanium (Ge) and its heterostructures with compound
semiconductors
offer a unique optoelectronic functionality due to its pseudo-bandgap
nature, that can be transformed to a direct bandgap material by providing
strain and/or mixing with tin. Moreover, two crystal surfaces, (100)Ge
and (110)Ge, that are technologically important for ultralow power
fin or nanosheet transistors, could offer unprecedented properties
with reduced surface defects after passivating these surfaces by atomic
layer deposited (ALD) dielectrics. In this work, the crystallographically
oriented epitaxial Ge/AlAs heterostructures were grown and passivated
with ALD Al2O3 dielectrics, and the microwave
photoconductive decay (μ-PCD) technique was employed to evaluate
carrier lifetimes at room temperature. The X-ray photoelectron spectroscopy
analysis reveals no role of orientation effect in the quality of the
ALD Al2O3 dielectric on oriented Ge layers.
The carrier lifetimes measured using the μ-PCD technique were
benchmarked against unpassivated Ge/AlAs heterostructures. Excitation
wavelengths of 1500 and 1800 nm with an estimated injection level
of ∼1013 cm–3 were selected to
measure the orientation-specific carrier lifetimes. The carrier lifetime
was increased from 390 ns to 565 ns for (100)Ge and from 260 ns to
440 ns for (110)Ge orientations with passivation, whereas the carrier
lifetime is almost unchanged for (111)Ge after passivation. This behavior
indicates a strong dependence of the measured lifetime on surface
orientation and surface passivation. The observed increase (>1.5×)
in lifetime with Al2O3-passivated (100)Ge and
(110)Ge surfaces is due to the lower surface recombination velocity
compared to unpassivated Ge/AlAs heterostructures. The enhancement
of carrier lifetime from passivated Ge/AlAs heterostructures with
(100)Ge and (110)Ge surface orientations offers a path for the development
of nanoscale transistors due to the reduced interface state density.