Strain Measurements With Langasite SAW Resonators at High Temperature

Li, Ling; Peng, Bin; Zhu, Jiaqi; He, Zhengxi; Yang, Yuntao; Zhang, Wanli

doi:10.1109/jsen.2020.3032477

Cited by 25 publications

(7 citation statements)

References 28 publications

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“…In the past a few years, SAW strain sensors based on the conventional rigid SAW devices have been proposed for automobile, aerospace, nuclear power and power generation industries. [117][118][119][120] However, due to the rigidity of these bulk devices, the strain sensing ranges of all these SAW sensors are limited to less than 400 µε 121 . Flexible SAW strain sensors have attracted much attention due to their good flexibility, and they can be integrated into electronic devices or attached to curved surfaces and human skins.…”

Section: Flexible Acoustic Wave Strain Sensormentioning

confidence: 99%

Flexible and wearable acoustic wave technologies

Zhou

Guo

Yong

et al. 2023

Applied Physics Reviews

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Flexible and wearable acoustic wave technology has recently attracted tremendous attention due to their wide-range applications in wearable electronics, sensing, acoustofluidics, and lab-on-a-chip, attributed to its advantages such as low power consumption, small size, easy fabrication, and passive/wireless capabilities. Great effort has recently been made in technology development, fabrication, and characterization of rationally designed structures for next-generation acoustic wave based flexible electronics. Herein, advances in fundamental principles, design, fabrication, and applications of flexible and wearable acoustic wave devices are reviewed. Challenges in material selections (including both flexible substrate and piezoelectric film) and structural designs for high-performance flexible and wearable acoustic wave devices are discussed. Recent advances in fabrication strategies, wave mode theory, working mechanisms, bending behavior, and performance/evaluation are reviewed. Key applications in wearable and flexible sensors and acoustofluidics, as well as lab-on-a-chip systems, are discussed. Finally, major challenges and future perspectives in this field are highlighted.

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Section: Flexible Acoustic Wave Strain Sensormentioning

confidence: 99%

Flexible and wearable acoustic wave technologies

Zhou

Guo

Yong

et al. 2023

Applied Physics Reviews

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“…Recently, Li et al [292] introduced an innovative Langasite (LGS) based SAW temperature sensor, offering good linearity in a wide range from 20 °C up to 600 °C. In their next work [293], they proposed a three-resonators-based SAW strain sensor with excellent linearity to be operated between 20 °C and 250 °C. In a recent study, however, Yan et al [294] fabricated and tested an LGS-based SAW strain sensor under strains of up to 500 με and a temperature range of 18 -700 °C, reaching ultimate sensitivity of nearly 20 Hz/με.…”

Section: ) Temperature Sensorsmentioning

confidence: 99%

Strain Sensing Technology to Enable Next-Generation Industry and Smart Machines for the Factories of the Future: A Review

Hamed,

O’Donnell,

Lishchenko

et al. 2023

IEEE Sensors J.

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In the era of digitalization, there is a huge focus on capturing data from manufacturing processes and systems. Since the promotion of Industry 4.0, the industrial marketplace has been crowded with solution providers who excel in capturing and aggregating data on the cloud and presenting it on dashboards. From machine states to production targets, this type of data has become more readily available from tools, controllers, switches, and factory bus systems. As the industry pushes deeper into the machine for information and aspires to have smart machines that can feel and react to experiences during the manufacturing process, then more sophisticated technology is necessary. Strain sensor technology is a logical measurement principle to address this challenge for many industrial sectors. For researchers and industrialists to progress toward the smart machine agenda, there must be a firm grasp of the "technology-solution fit," i.e., what strain technology could provide the most appropriate solution. This paper presents a review of the state of the art in strain sensors that are foreseen as frontrunners to enable next-generation smart components and intelligent tools. The review focuses on industrial strain sensing technologies that are at a mature place on the technology readiness levels (TRLs) and present themselves as highly practical solutions for smart components and digitized machines, considering sensitivity, powered or passive, wired or wireless, and robustness. Through this review, researchers and industrialists will have a suite of solutions to move on with their innovative designs of smart machines based on embedded strain sensor technology.

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“…The common LGS SAW mechanical sensors primarily include pressure sensors [ 24 , 25 ], strain sensors [ 26 , 27 ], and vibration sensors. Herein, the structure of the sensors mainly featured sealed cavities, cantilever beams, and ultra-thin substrates.…”

Section: Introductionmentioning

confidence: 99%

Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors

et al. 2022

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We proposed a novel Langasite (LGS) bonding method only using high temperature to solve the manufacturing difficulty of the sealed microcavity of pressure sensors. The optimal bonding parameters by comparative experiments were defined as 1350 °C for 3 h. Due to simple experimental conditions, low experimental cost, and be suitable for bonding wafers with various sizes, the method is convenient for popularization and mass-production, thus promoting the development of surface acoustic wave (SAW) devices at high temperatures. Simultaneously, an intact microcavity was observed by scanning electron microscopy, and a tight and void-free bonding interface with a transition layer thickness of 2.2 nm was confirmed via transmission electron microscopy. The results of tensile and leakage experiments indicated that the bonded wafer with the sealed microcavity exhibited a high bonding strength of 4.02 MPa and excellent seal performance. Compared to the original wafer, the piezoelectric constant of the LGS bonded wafer had a reduction of only 4.43%. The above characteristics show that the sealed microcavity prepared by this method satisfies the conditions for fabricating the LGS SAW pressure sensors. Additionally, based on the bonding interface characterizations, the mechanism of LGS bonding has been investigated for the first time.

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Strain Measurements With Langasite SAW Resonators at High Temperature

Cited by 25 publications

References 28 publications

Flexible and wearable acoustic wave technologies

Flexible and wearable acoustic wave technologies

Strain Sensing Technology to Enable Next-Generation Industry and Smart Machines for the Factories of the Future: A Review

Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors

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