“…Furthermore, in our recent work we have shown that substrates, used for the film deposition, also have a determining role on the final properties of the films [11]. Thus, platinized Si, mainly reported as substrate for KNN [6,7,8] and other piezoelectric films [9,10], has been shown to induce large tensile residual stress in sol–gel derived undoped KNN films due to thermal expansion mismatch, thus diminishing out-of-plane dielectric, ferroelectric, and piezoelectric response of the films [11]. On the other hand, platinized SrTiO 3 substrates, possessing much larger thermal expansion coefficient (TEC), have been shown to induce residual compressive stress in KNN films, significantly enhancing out-of-plane permittivity, polarization, and piezoresponse [11].…”