Strain–Stress Impact on Ferroelectric Devices: A Multilayer Analysis and Optimization Strategy for Neural Networks
Ryun-Han Koo,
Wonjun Shin,
Gyuweon Jung
et al.
Abstract:We investigate the effects of strain stress on the hafnium zirconium oxide ferroelectric tunnel junctions (FTJs). The impact of strain stress on each layer of the FTJ is investigated depending on the thickness of the metal capping layer and the post-metal-annealing temperature. It is revealed that, for the insulator layer, an increase in strain lead to an increased off-current in the FTJs. In contrast, increased strain stress in the ferroelectric layer directly increases the trap density, leading to an increas… Show more
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