2019
DOI: 10.1116/1.5093170
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Strategy for simultaneously increasing both hardness and toughness in ZrB2-rich Zr1−xTaxBy thin films

Abstract: Refractory transition-metal (TM) diborides exhibit inherent hardness. However, this is not always sufficient to prevent failure in applications involving high mechanical and thermal stress, since hardness is typically accompanied by brittleness leading to crack formation and propagation. Toughness, the combination of hardness and ductility, is required to avoid brittle fracture. Here, we demonstrate a strategy for simultaneously enhancing both hardness and ductility of ZrB2-rich thin films grown in pure Ar on … Show more

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Cited by 53 publications
(43 citation statements)
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“…Another possibility is the formation of a Zr‐B‐N glassy phase similar to the Hf‐B‐N phase that was observed in grain boundaries of HfB 2 ‐based composites reported by Silvestroni et al During the field evaporation process, though, the bonds between N and either Zr or B were broken and the ions were detected individually, which prevented unambiguous identification of the N‐containing species by APT. Such N contamination was not noted in the prior APT studies of ZrB 2 processed by physical vapor deposition; however, these studies did note the isolation of excesses of B and Ta to the boundary regions between columns . This dataset demonstrates that APT is an appropriate tool to collect detailed chemical information about impurity distribution as a function of processing parameters in electrically conductive borides.…”
Section: Resultsmentioning
confidence: 63%
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“…Another possibility is the formation of a Zr‐B‐N glassy phase similar to the Hf‐B‐N phase that was observed in grain boundaries of HfB 2 ‐based composites reported by Silvestroni et al During the field evaporation process, though, the bonds between N and either Zr or B were broken and the ions were detected individually, which prevented unambiguous identification of the N‐containing species by APT. Such N contamination was not noted in the prior APT studies of ZrB 2 processed by physical vapor deposition; however, these studies did note the isolation of excesses of B and Ta to the boundary regions between columns . This dataset demonstrates that APT is an appropriate tool to collect detailed chemical information about impurity distribution as a function of processing parameters in electrically conductive borides.…”
Section: Resultsmentioning
confidence: 63%
“…Such N contamination was not noted in the prior APT studies of ZrB 2 processed by physical vapor deposition; however, these studies did note the isolation of excesses of B and Ta to the boundary regions between columns. 33,34 This dataset demonstrates that APT is an appropriate tool to collect detailed chemical information about impurity distribution as a function of processing parameters in electrically conductive borides.…”
Section: Atom Probe Tomographymentioning
confidence: 92%
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“…In the past decades, the deposition of thin films has been a strategic alternative to provide improved surface properties. The development of protective layers on metallic substrates has enabled good wear resistance, [1][2][3][4][5][6][7][8][9][10] corrosion protection, [11][12][13][14][15][16][17][18][19][20][21][22][23][24] enhanced surface hardness, [25][26][27][28][29][30][31][32][33][34] and superior biocompatibility. [18,20,[35][36][37][38][39][40] Plasma deposition procedure is a promising technique that can be used to supply thin films, aiming at applications such as magnetron sputtering, [2,3,6,10,12,18,…”
Section: Introductionmentioning
confidence: 99%