Stress-balancing in piezoelectric adjustable x-ray optics

Bishop, Nathan L.; Kradinov, Vladimir; Reid, Paul B.; Jackson, Thomas N.; DeRoo, Casey T.; Trolier‐McKinstry, Susan

doi:10.1117/1.jatis.8.2.029004

Cited by 7 publications

(5 citation statements)

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“…A finite-element analysis (FEA) model of the stress induced during the deposition process has been shown to be consistent with producing optics with a resolution of 2.5 arcsec half-power diameter (HPD) at 1 keV. 16 Afterwards, a gold (Au) coating was applied to the concave side of the glass substrate via e-beam thermal evaporation. This layer makes the mirror optically reflective for metrology as well as soft X-ray reflective.…”

Section: Mirror Designmentioning

confidence: 94%

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Thin-film PZT actuator performance in adjustable x-ray optic segments

Buffo,

DeRoo,

Reid

et al. 2023

Optics for EUV, X-Ray, and Gamma-Ray Astronomy XI

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Many current outstanding questions in x-ray astronomy were addressed by Lynx, an observatory concept that concluded its study phase in 2019. High-effective area, high angular resolution x-ray missions like Lynx require thin (≤ 0.5 mm thick) mirrors with precise surface figures to maintain high angular resolution (≤ 0.5 arcsec). To study methods of meeting these requirements, adjustable x-ray optics have been fabricated with thin-film piezoelectric actuators to perform figure correction. These adjustable x-ray optics serve to correct low spatial frequency figure errors (⪆ 0.1 mm−1 ). The fabrication and actuator performance for an adjustable x-ray mirror that forms a conical approximation to a Wolter-I telescope are reported. This mirror has a BCB insulating layer with a top level of Ti traces to address its 288 actuator cells. The individual responses of cells are measured and on average they induce a figure change of 0.87 μm Peak-to-Valley (PV) with an associated Root Mean Square (RMS) of 0.10 μm. These measured cell responses are compared to predicted responses generated using a Finite-Element (FEA) analysis algorithm. On average the measured and predicted cell responses agree to within 0.06 μm RMS. The disagreement between predicted and measured cell responses is posited as being due to differences in radial constraints points between the FEA model and the as-built mirror mount.

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Section: Mirror Designmentioning

confidence: 94%

“…Recent work has modeled the deposition of compressively stressed SiO 2 to reduce PV figure errors of mirrors to within 1 µm PV. 18 Empirically demonstrating the stress compensation process for a PZT adjustable X-ray optic is part of the scope of work for a recently awarded NASA APRA grant.…”

Section: Optical Metrology and Mirror Figurementioning

confidence: 99%

Thin-film PZT actuator performance in adjustable x-ray optic segments

Buffo,

DeRoo,

Reid

et al. 2023

Optics for EUV, X-Ray, and Gamma-Ray Astronomy XI

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“…The idea of fully integrated strain-tunable optical devices such as adaptive optics, strain tunable photonic crystals, and phase-matched nonlinear optical (NLO) conversion devices requires the integration of piezoelectric and optical materials. [1][2][3][4][5][6][7][8] A single multifunctional material that could achieve both effective strain tuning of materials properties and exceptional optical response would be ideal from an engineering design perspective, but relatively few candidates are known, and of these, many are limited to bulk single crystals. [9,10] Both piezoelectricity and optical second harmonic generation (SHG), the subjects of this study, are third-rank tensor properties with the same tensor form; both require acentric structures with broken spatial inversion symmetry.…”

Section: Introductionmentioning

confidence: 99%

Large Enhancements in Optical and Piezoelectric Properties in Ferroelectric Zn_1‐_xMg_xO Thin Films through Engineering Electronic and Ionic Anharmonicities

Ryu

Kelley

et al. 2023

Advanced Physics Research

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Multifunctionality as a paradigm requires materials exhibiting multiple superior properties. Integrating second‐order optical nonlinearity and large bandgap with piezoelectricity can, for example, enable broadband, strain‐tunable photonics. Though very different phenomena at distinct frequencies, both second‐order optical nonlinearity and piezoelectricity are third‐rank polar tensors present only in acentric crystal structures. However, simultaneously enhancing both phenomena is highly challenging since it involves competing effects with tradeoffs. Recently, a large switchable ferroelectric polarization of ≈80 μC cm−2 was reported in Zn1‐xMgxO films. Here, ferroelectric Zn1‐xMgxO is demonstrated to be a platform that hosts simultaneously a 30% increase in the electronic bandgap, a 50% enhancement in the second harmonic generation (SHG) coefficients, and a near 200% improvement in the piezoelectric coefficients over pure ZnO. These enhancements are shown to be due to a 400% increase in the electronic anharmonicity and a ≈200% decrease in the ionic anharmonicity with Mg substitution. Precisely controllable periodic ferroelectric domain gratings are demonstrated down to 800 nm domain width, enabling ultraviolet quasi‐phase‐matched optical harmonic generation as well as domain‐engineered piezoelectric devices.

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“…Novel solutions and technologies were developed for realising high actuator densities in DMs [21,22] as well as advanced materials manufactured and tested. These materials include for example piezoelectric thin films with focus on having large displacements at low voltage levels and properties like memory effects [23][24][25][26]. The hysteretic deformable mirror (HDM) [27] was conceptually designed for space-based applications and features an actuator array of more than 16000 individually addressable locations, realized by 2D memory actuators utilizing piezoelectric hysteresis for stable shape configurations.…”

Section: A C K N O W L E D G M E N T Smentioning

confidence: 99%

“…Recently, new developments [23][24][25][26] increase the performance and characteristics of the piezoelectric materials so that the actuators suit well for DMs and their specific application. In summary, piezoelectric actuators [38] • high optical quality,…”

Section: Piezoelectric Actuatorsmentioning

confidence: 99%

Distributed actuation systems for adaptive optics: from structural modeling to design optimization

Schmerbauch¹

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1 introduction 1 1.1 Adaptive optics 1 1.2 Hysteretic deformable mirror 3 1.3 Outline and contributions 5 1.3.1 Publications 8 2 preliminaries 9 2.1 Design parameters and performance measures 9 2.2 Actuator technologies for deformable mirrors 12 2.3 Space-based applications and deformable mirror technology 17 2.3.1 Deformable mirror requirements 17 2.3.2 State of the art 18 2.4 Hysteresis models for asymmetric butterfly loops 19 2.4.1 Preisach model 19 2.4.2 Duhem model 20 3 semi-analytical plate model 23 3.1 Overview of plate models 23 3.2 Influence functions for the hysteretic deformable mirror 26 3.2.1 Determination of the influence matrix 26 3.2.2 Actuator model 31 3.3 Results and discussion 33 3.3.1 2D pattern for influence functions (Case 1 -5) 33 3.3.2 Least-square fitting 33 3.3.3 Simulation results 34 3.3.4 Comparison to conventional modeling approaches 41 3.4 Concluding remarks 43 4 investigation of the electrical coupling phenomenon 45 4.1 Consideration of the phenomenon in surface fitting process 46 4.2 Fundamental analysis of the electrical coupling 48 4.3 Theoretical frameworks for detailed analysis 50 4.3.1 Model of the hysteretic deformable mirror 51 4.3.2 Modeling of the memory material 53 4.3.3 Sensitivity analysis of the facesheet 56 4.4 Implementation and results 57 4.4.1 Hysteretic deformable mirror model in 3D 57 xi xii contents 4.4.2 Memory material implementation 58 4.4.3 Sensitivity of the facesheet 60 4.4.4 Discussion 63 4.5 Concluding remarks 64 5 development of 2.5d metamaterial actuation array 67 5.1 Introduction 67 5.2 Modular actuation array based on kirigami 68 5.2.1 Design of cut patterns 69 5.2.2 Numerical validation of cut patterns 69 5.2.3 Proof of concept experiments 70 5.3 Application of kirigami array in adaptive optics 74 5.3.1 Design concept of a deformable mirror 74 5.4 Discussion and concluding remarks 81 6 conclusions and outlook 87 a coefficient calculation by solution to poisson's equation 91 a.1 Respective formulas 91 a.2 Numerical integration 91 a.3 Coefficient calculation in Case 1 91 a.3.1 Sub-functions of f 1 94 a.3.2 Sub-functions of f 2 94 a.4 Coefficient calculation in Case 2 95 a.4.1 Sub-functions of f 1 95 a.4.2 Sub-functions of f 2 95 a.5 Coefficient calculation in Case 3 96 a.5.1 Sub-functions of f 1 97 a.5.2 Sub-functions of f 2 97 a.6 Coefficient calculation in Case 4 98 a.6.1 Sub-functions of f 1 99 a.6.2 Sub-functions of f 2 99 a.7 Coefficient calculation in Case 5 100 a.7.1 Sub-functions of f 1 101 a.7.2 Sub-functions of f 2 101 bibliography 103 summary 117 samenvatting 119 zusammenfassung 123

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Stress-balancing in piezoelectric adjustable x-ray optics

Cited by 7 publications

References 0 publications

Thin-film PZT actuator performance in adjustable x-ray optic segments

Thin-film PZT actuator performance in adjustable x-ray optic segments

Large Enhancements in Optical and Piezoelectric Properties in Ferroelectric Zn_1‐_xMg_xO Thin Films through Engineering Electronic and Ionic Anharmonicities

Distributed actuation systems for adaptive optics: from structural modeling to design optimization

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Stress-balancing in piezoelectric adjustable x-ray optics

Cited by 7 publications

References 0 publications

Thin-film PZT actuator performance in adjustable x-ray optic segments

Thin-film PZT actuator performance in adjustable x-ray optic segments

Large Enhancements in Optical and Piezoelectric Properties in Ferroelectric Zn1‐xMgxO Thin Films through Engineering Electronic and Ionic Anharmonicities

Distributed actuation systems for adaptive optics: from structural modeling to design optimization

Contact Info

Product

Resources

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Large Enhancements in Optical and Piezoelectric Properties in Ferroelectric Zn_1‐_xMg_xO Thin Films through Engineering Electronic and Ionic Anharmonicities