Stress-based vapor sensing using resonant microbridges

Southworth, D. R.; Bellan, Leon M.; Linzon, Yoav; Craighead, Harold G.; Parpia, J. M.

doi:10.1063/1.3393999

Cited by 69 publications

(41 citation statements)

References 33 publications

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“…It should be noted that from a mechanical perspective, the Flexure-FET operates close to pull-in instability, a critical point. Similar critical point sensing has also been reported for vapor sensors (25) that operate close to bucking-instability (25) and for mass sensors that operate close to saddle-node bifurcation (26), and their higher sensitivity has been confirmed experimentally. However, beyond the critical point sensing, the integrated transistoraction in the subthreshold regime provides the Flexure-FET an additional exponential sensitivity (and simpler direct current readout) that could not be achieved by the classical nonlinear sensor schemes.…”

mentioning

confidence: 49%

Flexure-FET biosensor to break the fundamental sensitivity limits of nanobiosensors using nonlinear electromechanical coupling

Jain

Nair

Alam

2012

Proc. Natl. Acad. Sci. U.S.A.

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In this article, we propose a Flexure-FET (flexure sensitive field effect transistor) ultrasensitive biosensor that utilizes the nonlinear electromechanical coupling to overcome the fundamental sensitivity limits of classical electrical or mechanical nanoscale biosensors. The stiffness of the suspended gate of Flexure-FET changes with the capture of the target biomolecules, and the corresponding change in the gate shape or deflection is reflected in the drain current of FET. The Flexure-FET is configured to operate such that the gate is biased near pull-in instability, and the FET-channel is biased in the subthreshold regime. In this coupled nonlinear operating mode, the sensitivity (S) of Flexure-FET with respect to the captured molecule density (N s ) is shown to be exponentially higher than that of any other electrical or mechanical biosensor.In other words, while S Flexure ∼ e ðγ 1 ffiffiffiffi N s p −γ 2 N s Þ , classical electrical or mechanical biosensors are limited to S classical ∼ γ 3 N S or γ 4 lnðN S Þ, where γ i are sensor-specific constants. In addition, the proposed sensor can detect both charged and charge-neutral biomolecules, without requiring a reference electrode or any sophisticated instrumentation, making it a potential candidate for various low-cost, point-of-care applications.label-free detection | genome sequencing | cantilever | spring-softening | critical-point sensors N anoscale biosensors are widely regarded as a potential candidate for ultrasensitive, label-free detection of biochemical molecules. Among the various technologies, significant research have focused on developing ultrasensitive nanoscale electrical (1) and mechanical (2) biosensors. Despite remarkable progress over the last decade, these technologies have fundamental challenges that limit opportunities for further improvement in their sensitivity ( Fig. 1A) (3-6). For example, the sensitivity of electrical nanobiosensors such as Si-Nanowire (NW) FET (field effect transistor) (Fig. 1B) is severely suppressed by the electrostatic screening due to the presence of other ions/charged biomolecules in the solution (7), which limits its sensitivity to vary linearly (in subthreshold regime) (3, 7) or logarithmically (in accumulation regime) (4,7,8,9) with respect to the captured molecule density N s . Moreover, the miniaturization and stability of the reference electrode have been a persistent problem, especially for lab-onchip applications (1). Finally, it is difficult to detect charge-neutral biological entities such as viruses or proteins using chargebased electrical nanobiosensor schemes.In contrast, nanomechanical biosensors like nanocantilevers (10, 11) (Fig. 1C) do not require biomolecules to be charged for detection. Here, the capture of target molecules on the cantilever surface modulates its mass, stiffness, and/or surface stress (5,11,12). This change in the mechanical properties of the cantilever can then be observed as a change in its resonance frequency (dynamic mode), mechanical deflection, or change in the resist...

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mentioning

confidence: 49%

Flexure-FET biosensor to break the fundamental sensitivity limits of nanobiosensors using nonlinear electromechanical coupling

Jain

Nair

Alam

2012

Proc. Natl. Acad. Sci. U.S.A.

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“…Therefore, an increase in Young's modulus is accompanied with a decrease in the strain and vice versa. The total combined effect will almost completely balance out in the frequency shift, whereas the addition of mass always causes a negative shift in (7). Also, the expected change in Young's modulus and the strain are expected to be very small, and we take both to be up to 2%, whereas the added mass is not constrained and is thus taken up to 10%.…”

Section: Mechanical Device Characteristics Figures 2(a)-2(c)mentioning

confidence: 99%

“…Typically, NEMS and MEMS resonators (operating in dynamic rather than static mode, in the high-frequency acoustic regime [7]) are driven through closed-gap configuration, and sensing in the gas or liquid phase is limited to clean surface preparation procedures, set by limitations related to stiction, viscous drag, and squeezed-film damping [7,[10][11][12]16]. Durable operation under harsh environmental conditions is an important ongoing goal for realistic integrated MEMS/NEMS sensors.…”

Section: Introductionmentioning

confidence: 99%

“…Since then, resonators based on microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have been proven as excellent platforms for material spectroscopy in a wide range of sensing applications, including solid [2][3][4][5], gas [6][7][8][9][10], and biochemical fluid composition [11,12], with unprecedented potential for large-scale integration of multiplexed sensors in small monolithic packages [13]. At the ultimate sensitivity limit of inertial mass sensing facilitating such resonating devices [14], recent experiments using NEMS resonators have successfully achieved the power to resolve single molecules [3], atoms [4], and even individual protons in real time [15].…”

Section: Introductionmentioning

confidence: 99%

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Liquid Mass Sensing Using Resonating Microplates under Harsh Drop and Spray Conditions

Mahajne

Guetta

Lulinsky

et al. 2014

Physics Research International

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We have performed in situ real time mass sensing of deposited liquid volatile droplets and sprays using plate-like microstructures, with robust and reusable performance attained over harsh conditions and multiple cycles of operation. A home-built electrooptical sensing system in ambient conditions has been used. The bimorph effect on the resonant frequency of altered mass loading, elasticity, and strain had been carefully compared, and the latter were found to be negligible in the presence of nonviscous liquids deposited on top of our microplate devices. In resonant mode, the loaded mass has been estimated from measured resonant frequency shifts and interpreted from a simple, uniformly deposited film model. A minimum submicrogram detectable mass was estimated, suggesting the system's potential for robust, fast, and reusable sensing capabilities, in the presence of volatile liquids under harsh operation conditions.

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“…5 When operating the micro-or nanoelectro mechanical systems close to their critical (unstable) configurations, it is possible to benefit from their reduced stiffness and high sensitivity while still avoiding pull-in. [6][7][8] It should be noticed that increasing the sensitivity by decreasing the stiffness will amplify the noise effects as well.…”

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confidence: 99%

Bi-stability of micro-plates: A sensitive mechanism for differential pressure measurements

Sajadi

Goosen

Keulen

2017

Applied Physics Letters

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The electrostatic instability (pull-in) of a flat electrode in a parallel plate capacitor has been shown to be highly sensitive to external mechanical loads such as pressure. In this paper, we substantiate the possibility of prompting additional unstable configurations in such a system, with a remarkable sensitivity to the applied pressure. This additional instability has significant advantageous properties for sensing purposes. In addition to the high sensitivity and robustness of the pull-in voltage measurements, it can be adjusted so that after the unstable configuration is met, a snap-through to a new stable configuration occurs. As a result of this bi-stable behavior, the contact between the electrodes, which is the main drawback of pull-in phenomena, will be easily avoided. The results of this paper particularly suggest the suitability of this mechanism for two different methods of pressure measurements.

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Stress-based vapor sensing using resonant microbridges

Cited by 69 publications

References 33 publications

Flexure-FET biosensor to break the fundamental sensitivity limits of nanobiosensors using nonlinear electromechanical coupling

Flexure-FET biosensor to break the fundamental sensitivity limits of nanobiosensors using nonlinear electromechanical coupling

Liquid Mass Sensing Using Resonating Microplates under Harsh Drop and Spray Conditions

Bi-stability of micro-plates: A sensitive mechanism for differential pressure measurements

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