1998
DOI: 10.1063/1.120691
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Stress-engineered spatially selective self-assembly of strained InAs quantum dots on nonplanar patterned GaAs(001) substrates

Abstract: The lattice-mismatch stress-induced two-dimensional-to-three-dimensional morphology change is combined with interfacet adatom migration to selectively assemble parallel chains of InAs islands on top of [11̄0] oriented stripe mesas of sub-100-nm widths on GaAs(001) substrates. On such mesa stripes, prepared in situ via size-reducing epitaxy, deposition of InAs amounts subcritical for island formation on planar GaAs (001) is shown to allow self-assembly of three, two, and single chains of InAs three-dimensional … Show more

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Cited by 111 publications
(64 citation statements)
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“…This high structural and optical quality of the QD arrays on the QWR template is attributed to the smoothness of the strain field modulation on the dot-diameter and dot-to-dot distance length scales which does not introduce any defects or irregularities in the QD arrays, often occurring when artificial patterning techniques are applied. [11][12][13][14][15][16][17] This is the key advantage of our method for QD ordering based on self-organized anisotropic strain engineering.…”
Section: ϫ2mentioning
confidence: 99%
“…This high structural and optical quality of the QD arrays on the QWR template is attributed to the smoothness of the strain field modulation on the dot-diameter and dot-to-dot distance length scales which does not introduce any defects or irregularities in the QD arrays, often occurring when artificial patterning techniques are applied. [11][12][13][14][15][16][17] This is the key advantage of our method for QD ordering based on self-organized anisotropic strain engineering.…”
Section: ϫ2mentioning
confidence: 99%
“…This preferential nucleation enables to control the dot positioning. As the lateral dimensions shrink, it is expected that the additional free surfaces [facets and the original (100)] will offer some strain relief, in contrast with a two-dimensional film [40][41][42]. Fig.…”
Section: Triple-axis X-ray Diffraction Of Corrugated Surfacesmentioning
confidence: 99%
“…Commonly, artificial patterning techniques are applied for the position control of QDs. [3][4][5][6] These techniques, however, often degrade the structural and optical properties of the QDs. To solve this problem, we have introduced a concept for the lateral ordering of QDs based on self-organized anisotropic strain engineering of an ͑In, Ga͒As/ GaAs quantum wire (QWR) superlattice (SL) template in molecular beam epitaxy (MBE).…”
Section: Introductionmentioning
confidence: 99%