By using an evaporation-induced self-assembly (EISA)
process, mesoporous
metal oxide thin films are prepared via molecular precursors undergoing
a sol–gel transition or by using nanoparticle dispersions as
the starting materials. Both methods are employed together with PIB50-b-PEO45 as the structure-directing
agent to produce porous TiO2 and ZrO2 thin films
with spherical mesopores of around 14 nm in diameter. These nanoparticle-
and sol–gel-derived films were investigated in terms of the
intrinsic in-plane stress development during the heat treatment up
to 500 °C to evaluate the impact of solvent evaporation, template
decomposition and crystallization on the mechanical state of the film.
The investigation revealed the lowest intrinsic stress for the nanoparticle-derived
mesoporous film, which is assigned to the combination of the relaxing
effects of the utilized diblock copolymer and the interparticular
gaps between the precrystalline nanoparticles. Furthermore, the residual
in-plane stress was studied after annealing steps ranging from 300
to 1000 °C and cooling down to room temperature. Here, TiO2 nanoparticle-derived mesoporous films possess a lower residual
stress than the sol–gel-derived mesoporous films, while in
the case of ZrO2 films, sol–gel-derived coatings
reveal the smallest residual stress. The latter is based on the lower
thermal expansion coefficient of the dominant monoclinic crystal phase
compared to that of the silicon substrate. Hence, the present crystal
structure has a strong influence on the mechanical state. The observation
in this study helps to further understand the stress-related mechanical
properties and the formation of mesoporous metal oxides.