Stress Relaxation of Poly-Si Film Formed by Excimer Laser Annealing

Abstract

We investigated the low-temperature processed polycrystalline-silicon (poly-Si) film formed by carrying out low-energy-density and multishot excimer laser annealing (ELA) of amorphous Si (a-Si) film on a glass or quartz substrate. The influence of secondary grain growth which grain size becomes larger than the film thickness on the tensile stress relaxation of the poly-Si film was clarified. Relationship between hydrogens which are supplied to the melt-Si from the bottom catalytic-chemical vapor deposition (Cat-CVD) SiN film and the stress relaxation was also examined. The tensile stress in the poly-Si film relaxes upon the appearance of the secondary grains, and the stress decreases with increasing diameter of the secondary grains. However, the hydrogen supply to melt-Si suppresses the secondary grain growth and the stress relaxation becomes marked as the hydrogen concentration decreases. Furthermore, the relationship between the dangling bond density corresponding to the crystal defect density and grain size was investigated, and the defect site was clarified. Lastly, the recrystallization model by ELA at low energy densities was discussed. The model was constructed based on the experimental data that the secondary grain growth occurs suddenly at the critical energy density and the critical shot number, and it was shown that the present model is consistent with the results related to the hydrogen concentration and the secondary grain growth.

Behavior of Hydrogen in Excimer Laser Annealing of Hydrogen-Modulation-Doped Amorphous Silicon Layer

“…In this case, high-quality poly-Si films must be prepared at low temperatures below 200 C. The poly-Si films prepared by the crystallization of amorphous silicon (a-Si) using excimer laser annealing (ELA) have been examined. [1][2][3][4] It is known that hydrogen (H) in a-Si film causes film exfoliation. Therefore, the H concentration is decreased to below 1 at.…”

Raman Characterization of Poly-Si Channel Materials for 3D Flash Memory Device Applications

“…Grain size and crystallinity of poly Si have traditionally been characterized by X-ray diffraction (XRD), high resolution scanning electron microscopy (HRSEM) and crosssectional transmission electron microscopy (XTEM) (6)(7)(8)(9)(10). XRD does not have high spatial resolution and only gives average grain size over large measurement areas.…”

Hydrogen Modulation-Doped Structures to Improve Crystalline Fraction of Polycrystalline Silicon Films Prepared by Excimer Laser Annealing at Low Energy Densities

“…It has been reported that grain growth toward the lateral direction was prevented by H in a-Si films with a uniform and high H concentration or high energy irradiation. 14) On the other hand, the projection size of the poly-Si films related to the grain size 15) increase occurring with an increase in shot number for ELHMD. The theory of secondary grain growth in the solid phase was studied by Thompson.…”