Stress sensor performance of sputtered Fe-Si-B alloy thin coating under tensile and bending loads

Kurita, Hiroki; Diguet, Gildas; Froemel, Joerg; Narita, Fumio

doi:10.1016/j.sna.2022.113652

Cited by 4 publications

(5 citation statements)

References 22 publications

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“…The largest negative GMI ratio could be attributed to the changes in the magnetization mechanism and the inductance of the meanders caused by the stresses. Previous studies have shown that tensile and bending loads lead to significant changes in the inductance of soft magnetic materials, and the magnetic induction strength tends to decrease with increasing tensile and compressive stress, leading to changes in the impedance of materials [ 37 ]. In addition, the GMI ratio of a thin film with almost zero magnetostriction is usually positive [ 23 ].…”

Section: Resultsmentioning

confidence: 99%

Giant Magnetoimpedance Effect of Multilayered Thin Film Meanders Formed on Flexible Substrates

et al. 2023

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The giant magnetoimpedance effect of multilayered thin films under stress has great application prospects in magnetic sensing, but related studies are rarely reported. Therefore, the giant magnetoimpedance effects in multilayered thin film meanders under different stresses were thoroughly investigated. Firstly, multilayered FeNi/Cu/FeNi thin film meanders with the same thickness were manufactured on polyimide (PI) and polyester (PET) substrates by DC magnetron sputtering and MEMS technology. The characterization of meanders was analyzed by SEM, AFM, XRD, and VSM. The results show that multilayered thin film meanders on flexible substrates also have the advantages of good density, high crystallinity, and excellent soft magnetic properties. Then, we observed the giant magnetoimpedance effect under tensile and compressive stresses. The results show that the application of longitudinal compressive stress increases the transverse anisotropy and enhances the GMI effect of multilayered thin film meanders, while the application of longitudinal tensile stress yields the opposite result. The results provide novel solutions for the fabrication of more stable and flexible giant magnetoimpedance sensors, as well as for the development of stress sensors.

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Section: Resultsmentioning

confidence: 99%

Giant Magnetoimpedance Effect of Multilayered Thin Film Meanders Formed on Flexible Substrates

et al. 2023

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“…The inductance change is presented in Figure 1 for the external field in the direction of the sample and in Figure 2 for the external field applied perpendicularly [17]. units).…”

Section: Resultsmentioning

confidence: 99%

“…The inductance change is presented in Figure 1 for the external field in the direction of the sample and in Figure 2 for the external field applied perpendicularly [17]. After this set of measurements, performed in the longitudinal magnetic field configuration, the electromagnet was rotated to apply the magnetic field perpendicular to the sample axis.…”

Section: Resultsmentioning

confidence: 99%

“…Sample production and mechanical test were described in [17] and are briefly summarized here: the magnetic material, Ti/Fe 79 Si 7 B 14 /Ti, was sputtered using a magnetron system (QAM-4-S, ULVAC, Inc., Tokyo, Japan) on a 300 µm thick Si wafer and the thicknesses were 20/500/20 nm, respectively. The titanium acted as adhesion layer and surface protection.…”

Section: Methodsmentioning

confidence: 99%

“…Beside general investigations as a strain gauge, also more specific applications, such as for structural health monitoring, pressure sensors, or force sensors have been proposed [15,16]. In a recent work, an amorphous FeSiB material was used to demonstrate the application for stress sensor [17]. A thin layer of this material was sputtered on top of a silicon beam.…”

Section: Introductionmentioning

confidence: 99%

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Magneto Elasticity Modeling for Stress Sensors

et al. 2022

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In this article, the stress/stress sensing capability of FeSiB thin films is demonstrated and discussed. The sensing relies on the change in permeability by the application of stress, compressive and tensile, and the application of DC magnetic field. This susceptibility/permeability was tested by the exciting field (AC) being in the same direction with the applied stress. The susceptibility was shown to exhibit a maximal value at a given applied stress, the critical stress. Moreover, this maximal amplitude and position was changing with the application of an external DC magnetic field. For the DC field applied in the direction of the exciting field (AC) and longitudinal to the stress, the critical stress was shifted toward negative values and for the DC field applied perpendicularly, the critical stress was shifted toward larger positive values. This was experimentally demonstrated, and a model was constructed for a better understanding.

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Energy-harvesting and mass sensor performances of magnetostrictive cobalt ferrite-spattered Fe–Co alloy plate

Kurita¹,

Fakhruddin²,

Inoue³

et al. 2023

Journal of Alloys and Compounds

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Stress sensor performance of sputtered Fe-Si-B alloy thin coating under tensile and bending loads

Cited by 4 publications

References 22 publications

Giant Magnetoimpedance Effect of Multilayered Thin Film Meanders Formed on Flexible Substrates

Giant Magnetoimpedance Effect of Multilayered Thin Film Meanders Formed on Flexible Substrates

Magneto Elasticity Modeling for Stress Sensors

Energy-harvesting and mass sensor performances of magnetostrictive cobalt ferrite-spattered Fe–Co alloy plate

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