Stresses in Silicon Dioxide Films Deposited from Dielectric Targets: Results of Atomistic Modelling

Grigoriev, F. V.; Sulimov, V. B.; Tikhonravov, A. V.

doi:10.3103/s0027134924700073

Moscow Univ. Phys.

2024

DOI: 10.3103/s0027134924700073

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Stresses in Silicon Dioxide Films Deposited from Dielectric Targets: Results of Atomistic Modelling

F. V. Grigoriev,

V. B. Sulimov,

A. V. Tikhonravov

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Stresses in Silicon Dioxide Films Deposited from Dielectric Targets: Results of Atomistic Modelling

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References 16 publications

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