2009
DOI: 10.1116/1.3086661
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Strong exciton-photon coupling in ZnO based resonators

Abstract: The authors report on the fabrication of high quality all-oxide Bragg reflectors (BRs) and ZnO based resonators. The resonator consists of a bulk half-wavelength ZnO microcavity embedded between two BRs, each made of 10.5 layer pairs of yttria stabilized zirconia and Al2O3. Scanning transmission electron microscopy and atomic force microscopy, yield smooth interfaces and low surface roughness for the BR as well as the resonator. For the BR with 10.5 layer pairs the authors obtain reflectivities up to 99.2% wit… Show more

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Cited by 10 publications
(12 citation statements)
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“…In order to investigate the material DFs, the structure properties, and the growth rate, we have grown amorphous and single‐ or microcrystalline single layers and layer stacks with different layer sequences and pair numbers on planar Si, GaAs, InP, and Al 2 O 3 substrates 20, 24–27. For the a‐SiO x and a‐Si layers we have found that the higher the deposition temperature T g is, the lower is the surface roughness (8 and 3 nm rms on a $2.2 \times 2.2\,{\rm \mu m}^2 $ area for $T_{\rm g} = 90\,^\circ {\rm C}$ respective 120 °C) 26.…”
Section: Bragg Reflectors On Planar Structuresmentioning
confidence: 99%
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“…In order to investigate the material DFs, the structure properties, and the growth rate, we have grown amorphous and single‐ or microcrystalline single layers and layer stacks with different layer sequences and pair numbers on planar Si, GaAs, InP, and Al 2 O 3 substrates 20, 24–27. For the a‐SiO x and a‐Si layers we have found that the higher the deposition temperature T g is, the lower is the surface roughness (8 and 3 nm rms on a $2.2 \times 2.2\,{\rm \mu m}^2 $ area for $T_{\rm g} = 90\,^\circ {\rm C}$ respective 120 °C) 26.…”
Section: Bragg Reflectors On Planar Structuresmentioning
confidence: 99%
“…For the a‐SiO x and a‐Si layers we have found that the higher the deposition temperature T g is, the lower is the surface roughness (8 and 3 nm rms on a $2.2 \times 2.2\,{\rm \mu m}^2 $ area for $T_{\rm g} = 90\,^\circ {\rm C}$ respective 120 °C) 26. The Al 2 O 3 layers grown at $T_{\rm g} = 735\,^\circ {\rm C}$ have been found to be microcrystalline or amorphous, regardless of the substrate material and the position within a layer stack, and reveal surface roughness values of up to $R_{\rm a} = 0.3\,{\rm nm}$ 20, 28, whereas those grown at $T_{\rm g} = 150\,^\circ {\rm C}$ are amorphous and very smooth with $R_{\rm a} = 0.15\,{\rm nm}$ . For the high‐temperature ($T_{\rm g} = 735\,^\circ {\rm C}$ ) ZrO 2 layers we have obtained slightly rougher surfaces with $R_{\rm a} = 0.25 - 0.80\,{\rm nm}$ .…”
Section: Bragg Reflectors On Planar Structuresmentioning
confidence: 99%
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