“…For the a‐SiO x and a‐Si layers we have found that the higher the deposition temperature T g is, the lower is the surface roughness (8 and 3 nm rms on a $2.2 \times 2.2\,{\rm \mu m}^2 $ area for $T_{\rm g} = 90\,^\circ {\rm C}$ respective 120 °C) 26. The Al 2 O 3 layers grown at $T_{\rm g} = 735\,^\circ {\rm C}$ have been found to be microcrystalline or amorphous, regardless of the substrate material and the position within a layer stack, and reveal surface roughness values of up to $R_{\rm a} = 0.3\,{\rm nm}$ 20, 28, whereas those grown at $T_{\rm g} = 150\,^\circ {\rm C}$ are amorphous and very smooth with $R_{\rm a} = 0.15\,{\rm nm}$ . For the high‐temperature ($T_{\rm g} = 735\,^\circ {\rm C}$ ) ZrO 2 layers we have obtained slightly rougher surfaces with $R_{\rm a} = 0.25 - 0.80\,{\rm nm}$ .…”