High-resolution transmission electron microscopy (HRTEM) of carbon particles has been carried out at 80 C in saturated water vapor, to evaluate any structural alterations. Amorphous particles or microcrystallites of carbon based on the graphitic structure were altered to more stable graphitic structures such as ribbons or onion-like structures. The stable graphitic structure was altered again to the amorphous structure. Results are interpreted in terms of the oxidation of carbon particles in air. The differences in alterations among carbon particles, Pt clusters on carbon particles, and Pt clusters in carbon particles are presented on the basis of HRTEM images.