Structural Analysis of Coal Fly Ash Particles by means of Focused-Ion-Beam Time-of-Flight Mass Spectrometry

Sakamoto, Tetsuo; Shibata, Kazuaki; Takanashi, Koichi; Owari, Masanori; Nihei, Yoshimasa

doi:10.1380/ejssnt.2004.45

Cited by 9 publications

(12 citation statements)

References 11 publications

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“…The instrument has been also described elsewhere [4]. Mass spectra were acquired using 69 Ga + ion pulses at an impact energy of 20 keV, ion current of 750 pA in the dc mode, pulse width of 30 ns, and pulse frequency of 5 kHz.…”

Section: B Measurements By Tof-simsmentioning

confidence: 99%

“…We have developed a dual focused ion beam (FIB) ToF-SIMS technique for accurate three-dimensional analysis [1][2][3]. In particular, we have developed a novel etching method, called "shave-off sectioning" using a Ga-FIB, which reduces beam-induced damage [4]. Shave-off sectioning can create an arbitrary section on a sample effectively against composites with wide variety of shape.…”

Section: Introductionmentioning

confidence: 99%

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Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Yamazaki

Akiba

Tomiyasu

et al. 2015

e-J. Surf. Sci. Nanotech.

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Three-dimensional microanalysis of the microstructure of organic materials is important in the development and progress of novel materials on the micro-to-nanometer scales. We have developed the three-dimensional microanalysis method using focused ion beams (FIBs) for section processing (shave-off scanning) and mapping for time-of-flight secondary ion mass spectrometry (ToF-SIMS). Shave-off scanning can effectively create an arbitrary section on a sample set against composite materials with a wide variety of shapes; three-dimensional sample images are then obtained by alternately operating two FIBs. From the simulation results, we could set the optimum condition of beam irradiation. In this study, we confirmed the enhancement of secondary ion intensity by Au deposition under ToF-SIMS mapping with the optimized condition, and examine the usefulness of the simulation. The enhanced maps of characteristic polystyrene (PS) fragment ions were obtained. In addition, we observed the distribution of Au deposition by mapping results. These maps showed same tendency. The intensity of PS fragment ions was enhanced according to existence of deposited Au particles. These results indicated that a precise analysis of 3D MetA-SIMS can be realized.

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Section: B Measurements By Tof-simsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Yamazaki

Akiba

Tomiyasu

et al. 2015

e-J. Surf. Sci. Nanotech.

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“…Owing to its high sensitivity, dynamic SIMS had been used to analysis the elemental distribution and depth profiles of inorganic solid samples. For example, the distribution of dopants in optical fibers [1] and the elemental distribution of active materials in electrodes [2] and environmental particles [3] have been measured using SIMS. In materials for nanotechnology, efficiency is affected by the smaller structure and slight differences in the density of impurities.…”

Section: Introductionmentioning

confidence: 99%

Study on Anisotropy of Axial Resolutions of Two-Dimensional Shave-Off Method

Shirakura

Tomiyasu

Owari

2016

e-J. Surf. Sci. Nanotech.

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In the shave-off method, which combines an X-axis sweep with a much slower Y-axis sweep, the sample is completely etched using a Ga focused ion beam (FIB). One advantage of this method is the higher axial resolution obtained because of sputtering by the edge of the FIB. Recently, our group developed a two-dimensional (2D) shave-off method and 2D data acquisition was achieved. This method enables the analysis of curved interfaces, such as transistors, by determining the analytical axes after the measurement. In the shave-off method, the axial resolution along the Y-axis has been studied, but the X-axial resolution has not been studied. In this study, we analyzed the X-and Y-axial resolutions using experimental measurements and simulations. The axial resolution was revealed to be anisotropic by measurement of an alumina particle, and further analyses were performed by simulating the etching process. The X-axial resolution of the shave-off scan was suggested to be similar to that of a raster scan. A simulation of the shape of the shave-off cross-section showed that the anisotropic axial resolution was caused by etching with the whole width of the FIB along the X-axis, except during the last sweep before complete etching of the sample. Calculation of FIB profiles using the Lorentzian function suggested an approach for improved high-resolution 2D shave-off measurements.

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“…We have developed a dual focused ion beam (FIB) ToF‐SIMS technique for accurate three‐dimensional analysis . In particular, we have developed a novel etching method, called ‘shave‐off sectioning’ using a Ga + FIB, which reduces beam‐induced damage . Shave‐off scanning can effectively create an arbitrary section on a sample positioned against a composite material with wide a variety of shapes allowing us to obtain a three‐dimensional sample image by alternately operating two FIBs.…”

Section: Introductionmentioning

confidence: 99%

Metal‐assisted SIMS for three‐dimensional analysis using shave‐off section processing

Yamazaki

Tobe

Akiba

et al. 2014

Surface & Interface Analysis

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Three-dimensional microanalysis of the microstructure of organic materials is important in the development and progress of analytical methods on the micro-to-nanometer scales. We have developed a novel three-dimensional microanalysis method using focused ion beams for section processing (shave-off scanning) and time-of-flight secondary ion mass spectrometry for mapping. Shave-off scanning can effectively create an arbitrary section on a sample set against composites materials with a wide variety of shapes; three-dimensional sample images are then obtained by alternately operating two focused ion beams. In this study, we adapted metal-assisted secondary ion mass spectrometry for three-dimensional microanalysis. We have devised a unique method whereby gold is deposited on a section to be analyzed after every shave-off sectioning by setting a gold plate at the back of the sample. Consequently, gold was observed to be deposited on the created cross-section concurrently with shave-off sectioning, resulting in a substantially enhanced secondary ion intensity.

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Structural Analysis of Coal Fly Ash Particles by means of Focused-Ion-Beam Time-of-Flight Mass Spectrometry

Cited by 9 publications

References 11 publications

Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Study on Anisotropy of Axial Resolutions of Two-Dimensional Shave-Off Method

Metal‐assisted SIMS for three‐dimensional analysis using shave‐off section processing

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