Structural and composition analysis of Apex™ and Foturan™ photodefinable glasses

Tantawi, Khalid; Waddel, Emmanuel; Williams, John D.

doi:10.1007/s10853-013-7326-5

Cited by 11 publications

(10 citation statements)

References 31 publications

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“…Unlike amorphous glass, photodefinable glass [10] is a special type of glass in which microstructures can be formed without the use of any conventional drilling or micromachining process. When exposed to ultra-violet (UV) radiation and baked at a certain temperature and duration, the photodefinable glass transforms into its crystalline-phase and becomes very reactive to hydrofluoric acid.…”

Section: Introductionmentioning

confidence: 99%

Investigation of a photodefinable glass substrate for millimeter-wave radios on package

Kamgaing

Elsherbini

Frank

et al. 2014

2014 IEEE 64th Electronic Components and Technology Conference (ECTC)

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Photodefinable glass has been investigated for applications at mm-wave frequencies. Test structures including throughglass vias, transmission lines and microstrip patch antennas have been fabricated and fully characterized up to 67 GHz. Good correlation was obtained between simulation and measurements. The antenna exhibited return loss better than 10 dB in the frequency band of interest. Via transition losses were less than 0.15 dB/via and the transmission line insertion loss was ~ 3.3 dB/cm at 60 GHz.

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Section: Introductionmentioning

confidence: 99%

Investigation of a photodefinable glass substrate for millimeter-wave radios on package

Kamgaing

Elsherbini

Frank

et al. 2014

2014 IEEE 64th Electronic Components and Technology Conference (ECTC)

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“…Surface topography and surface energy enable control to produce smooth surfaces with optical quality for imaging systems. [91][92][93][94][95] Roughness can be adopted specifically for the attachment of living cells in tissue engineering. 90 Other processing operations typical for glass, such as ion exchange or glass crystallization, enable the optimization of properties such as refractive index profile, spectral absorption, or mechanical strength.…”

Section: Photoform Process For Micro-optical Componentsmentioning

confidence: 99%

Perspectives of reactive ion etching of silicate glasses for optical microsystems

Weigel

Brokmann

Hofmann

et al. 2021

J. Optical Microsystems

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We provide a review of the latest research findings as well as the future potential of plasma-based etching technology for the fabrication of micro-optical components and systems. Reactive ion etching (RIE) in combination with lithographic patterning is a well-established technology in the field of micro-and nanofabrication. Nevertheless, practical implementation, especially for plasma-based patterning of complex optical materials such as alumino-silicate glasses or glass-ceramics, is still largely based on technological experience rather than established models. Such models require an in-depth understanding of the underlying chemical and physical processes within the plasma and at the glass-plasma/mask-plasma interfaces. We therefore present results that should pave the way for a better understanding of processes and thus for the extension of RIE processes toward innovative three-dimensional (3D) patterning as well as for the processing of chemically and structurally inhomogeneous silicate-based substrates. To this end, we present and discuss the results of a variety of microstructuring strategies for different application areas with a focus on micro-optics. We consider the requirements for refractive and diffractive micro-optical systems and highlight potentials for 3D dry chemical etching by selective tailoring of the material structure. The results thus provide first steps toward a knowledge-based approach to RIE processing of universal dielectric glass materials for optical microsystems, which also has a significant impact on other microscale applications. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 International License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…using rare photostructurable Foturan glass (Hanada et al 2008; Tantawi et al 2013). Despite glass is a main LOC construction material for other biological research, i.e.…”

Section: Introductionmentioning

confidence: 99%

“…All–glass microaquaria are also hardly encountered in the literature, in addition the available solutions require sophisticated technology, e.g. using rare photostructurable Foturan glass (Hanada et al 2008 ; Tantawi et al 2013 ). Despite glass is a main LOC construction material for other biological research, i.e.…”

Section: Introductionmentioning

confidence: 99%

Study of the behavior of Euglena viridis, Euglena gracilis and Lepadella patella cultured in all-glass microaquarium

Podwin

Kubicki

Dziuban

2017

Biomed Microdevices

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In the paper, the microaquarium fabricated in a form of entirely glass lab-on-a-chip for culturing and microscale study of microorganisms has been presented. A new approach towards cellular studies that brings a significant improvement over commonly utilized – polymer-based solutions has been shown. For the first time, all-borosilicate glass chip was applied for the culturing of the selected microorganisms and enabled notable population growth and behaviorism investigation. The chip fabrication method in comparison to typical glass chip technology was notably simplified, including quick patterning and low temperature bonding in 80 °C. In the studies, both a single-cell (Euglena gracilis and Euglena viridis) and multi-cell microorganisms (Lepadella patella) were cultured in the microaquarium. Behaviorism of the selected microorganisms was investigated by supplying various proportions of carbon dioxide, nitrogen and air into the chip. Tests included studies of microorganisms chemotaxis, viability (mostly based on photosynthesis process) and coexistence in the lab-on-a-chip environment. The experiments confirmed that the developed chip is a tool that fits the requirements for the culturing and behavioral studies of microorganisms and constitute ground-works to propel its further application in broadly defined cellular study field.

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Structural and composition analysis of Apex™ and Foturan™ photodefinable glasses

Cited by 11 publications

References 31 publications

Investigation of a photodefinable glass substrate for millimeter-wave radios on package

Investigation of a photodefinable glass substrate for millimeter-wave radios on package

Perspectives of reactive ion etching of silicate glasses for optical microsystems

Study of the behavior of Euglena viridis, Euglena gracilis and Lepadella patella cultured in all-glass microaquarium

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