Structural and electrical properties of nanocolumnar W-Mo thin films with a Janus-like structure

Boukhalfa, Houssem; Potin, Valérie; Martin, Nicolas

doi:10.1016/j.surfcoat.2022.128928

Cited by 1 publication

(1 citation statement)

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“…The last years have witnessed the flourishing of numerous applications and technological devices based on nanocolumnar porous, thin films [1]. These are formed by nanocolumns with a typical diameter and side-to-side distance in the order of 100 nm, making these materials less dense and with a much larger specific surface than their compact counterpart [2][3][4], and with different optical, electrical, and magnetic properties [5][6][7][8][9][10][11][12]. These features make them good candidates for the development of numerous technological devices, such as gas or liquid sensors, optical coatings, and electrodes or instruments for fluid manipulation, among others [13][14][15][16][17][18][19][20][21][22][23][24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Structure and Void Connectivity in Nanocolumnar Thin Films Grown by Magnetron Sputtering at Oblique Angles

Alvarez,

Regodon,

Acosta-Rivera

et al. 2023

Coatings

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The morphology and void connectivity of thin films grown by a magnetron sputtering deposition technique at oblique geometries were studied in this paper. A well-tested thin film growth model was employed to assess the features of these layers along with experimental data taken from the literature. A strong variation in the film morphology and pore topology was found as a function of the growth conditions, which have been linked to the different collisional transport of sputtered species in the plasma gas. Four different characteristic film morphologies were identified, such as (i) highly dense and compact, (ii) compact with large, tilted mesopores, (iii) nanocolumns separated by large mesopores, and (iv) vertically aligned sponge-like coalescent nanostructures. Attending to the topology and connectivity of the voids in the film, the nanocolumnar morphology was shown to present a high pore volume and area connected with the outside by means of mesopores, with a diameter above 2 nm, while the sponge-like nanostructure presented a high pore volume and area, as well as a dense network connectivity by means of micropores, with a diameter below 2 nm. The obtained results describe the different features of the porous network in these films and explain the different performances as gas or liquid sensors in electrochromic applications or for infiltration with nanoparticles or large molecules.

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