Preferential annihilation of mobile surface vacancies at the ends, rather than the sides of dimer rows leads to a new, nonequilibrium, single-domain phase of Si(100) that is not accessible by epitaxial growth but is stable at moderate temperatures (r~450°C). These results emerge from a tunneling microscope study of layer-by-layer removal of Si from Si (100) under 225-eV Xe-ion bombardment. PACS numbers: 79.20.Rf, 61.16.Di, 68.35.FxSeveral recent experiments using diffraction oscillations [1,2] and tunneling microscopy (STM) [3,4] have established (i) that the evolution of both metal surfaces and Si under low-energy ( < 250 eV) ion bombardment is mediated by mobile surface vacancies created during sputtering, and (ii) that aspects of surface evolution under low-energy sputtering can be described in terms analogous to those associated with epitaxial growth. Specifically, mobile surface vacancies can nucleate monolayer-deep depressions, or "vacancy islands," and can annihilate at step edges. An understanding of surface vacancy kinetics is therefore an important component of a general description of low-energy-ion/solid interactions, and in particular of the development of advanced growth techniques that employ ion-beam stimulation [5,6].We analyze the kinetics of surface vacancies on silicon via the natural analogy with adatom kinetics in growth. Recent STM studies provide a quantitative description of the anisotropic adatom diffusion and accommodation in Si/Si(100) homoepitaxy [7,8]. In particular, they show that preferential incorporation of impinging atoms at the ends rather than the sides of dimer rows is responsible for the more rapid progression of the "ragged" (SB) steps relative to the "straight" (S A ) steps and, consequently, the metastable enhancement of the domain (B) with dimer rows perpendicular to the step edges. (We employ Chadfs notation for step classification [9].)Here we report the first demonstration of anisotropic, surface vacancy annihilation on Si(100), using STM to observe the relative retraction of straight and ragged steps on that surface following sputtering. We show that the formation of a new, single-,4-domain Si (100) surface, which is stable at common growth temperatures (T ~~ 450°C), is a consequence of the anisotropy of vacancy annihilation at steps.Si(100) wafers, offcut 0.2° toward the [110] direction as measured by x-ray diffraction, were initially cleaned chemically [10] and then transferred to an ultrahigh vacuum chamber, where 1.0-keV Xe sputtering followed by annealing at 1150°C produced a strong 2x1 pattern in low-energy electron diffraction. As shown in Fig. 1, the misorientation results in roughly equally spaced terraces, separated by single atomic steps. The 90° relative orientation of dimer rows on adjacent terraces leads to alternating A and B domains; type A has dimer rows running parallel to the step edge, and type B consists of dimers that run perpendicular to the step edge.A surface prepared in this manner was exposed to 225-eV Xe-ion bombardment at a flux of 0.33 /...