“…[5][6][7][8][9][10] Therefore, MoO x films are widely used in many fields. There are various methods for preparing MoO x thin films, commonly used are spray pyrolysis, [11,12] pulsed molecular laser deposition, [13,14] sol-gel method, [15,16] sputtering, [17,18] etc. However, the films prepared by these techniques often have the problems of poor uniformity, lack of smoothness, and low repetition rate.…”