2022 International Semiconductor Conference (CAS) 2022
DOI: 10.1109/cas56377.2022.9934156
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Structural and magnetic changes in CoAlZr thin films upon post annealing

Abstract: We present a study of the effect of annealing amorphous ferromagnetic thin films of Co 0.85 (Al 0.7 Zr 0.3 ) 0.15 , post deposition. The annealing was done in vacuum with no applied magnetic field. We find that already at a relatively low annealing temperature of 130 • C there is crystallite formation that introduces both structural and magnetic inhomogeneity. This does not affect the saturation magnetization strongly, but strongly affects the switching behavior and the overall effective anisotropy of the film… Show more

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