Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

Liang, Shih-Chang; Tsai, Du‐Cheng; Chang, Zue-Chin; Sung, Huan-Shin; Lin, Yi‐Chen; Yeh, Yi-Jung; Deng, Min-Jen; Shieu, Fuh‐Sheng

doi:10.1016/j.apsusc.2011.09.006

Cited by 111 publications

(33 citation statements)

References 25 publications

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“…They tend to form simple BCC or FCC solid solutions, or amorphous phase and nanosized grain-containing crystalline phases. In recent years, great efforts have been focused on HEA films prepared by the magnetron sputtering method, such as, TiVCrAlZrN x [7], (TiVCrZrHf)N [8], (AlCrMoTaTi)N [9], FeCoNiCuVZrAl [10], etc. It has been shown that these HEA films display many advantages in terms of both mechanical and physical properties, high hardness and wear resistance [11][12][13], high resistance to corrosion [14], and oxidation [15], and excellent thermal stability especially when used as diffusion barriers in copper metallization [16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Nano-Crystallization of High-Entropy Amorphous NbTiAlSiWxNy Films Prepared by Magnetron Sputtering

Sheng

Yang

Wang

et al. 2016

Entropy

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High-entropy amorphous NbTiAlSiW x N y films (x = 0 or 1, i.e., NbTiAlSiN y and NbTiAlSiWN y ) were prepared by magnetron sputtering method in the atmosphere of a mixture of N 2 + Ar (N 2 + Ar = 24 standard cubic centimeter per minute (sccm)), where N 2 = 0, 4, and 8 sccm). All the as-deposited films present amorphous structures, which remain stable at 700˝C for over 24 h. After heat treatment at 1000˝C the films began to crystalize, and while the NbTiAlSiN y films (N 2 = 4, 8 sccm) exhibit a face-centered cubic (FCC) structure, the NbTiAlSiW metallic films show a body-centered cubic (BCC) structure and then transit into a FCC structure composed of nanoscaled particles with increasing nitrogen flow rate. The hardness and modulus of the as-deposited NbTiAlSiN y films reach maximum values of 20.5 GPa and 206.8 GPa, respectively. For the as-deposited NbTiAlSiWN y films, both modulus and hardness increased to maximum values of 13.6 GPa and 154.4 GPa, respectively, and then decrease as the N 2 flow rate is increased. Both films could be potential candidates for protective coatings at high temperature.

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Section: Introductionmentioning

confidence: 99%

Nano-Crystallization of High-Entropy Amorphous NbTiAlSiWxNy Films Prepared by Magnetron Sputtering

Sheng

Yang

Wang

et al. 2016

Entropy

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“…With higher magnification, a typical 'pattern' can be observed associated with delaminations between nano-sublayers of wear-resistant layer of coating (Figure 4b). These delaminations can inhibit the formation of cross cracks, and that can slightly improve the performance properties of the coating [16].…”

Section: Resultsmentioning

confidence: 99%

“…Recently, the properties of multicomponent coatings, sometimes called "highly entropic" coatings, have been extensively studied. In particular, the following coatings were investigated (Ti,V,Cr,Zr,Hf)N [15,16], (Al,Cr,Ta,Ti,Zr)N [17], (Al,Cr,Nb,Si,Ti,V)N [18], and (Zr,Nb,Cr,Al)N [19]. In these studies, it was shown that the addition of alloying elements (in particular, Nb, Cr, Nf, Ta) to the Zr-N, Al-N or Ti-N nitride systems reduces the average cavitation velocity and abrasive wear of the coatings.…”

Section: Introductionmentioning

confidence: 99%

Influence of Thickness of Multilayered Nano-Structured Coatings Ti-TiN-(TiCrAl)N and Zr-ZrN-(ZrCrNbAl)N on Tool Life of Metal Cutting Tools at Various Cutting Speeds

et al. 2018

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This paper considers the influence of thickness of multilayered nano-structured coatings Ti-TiN-(TiCrAl)N and Zr-ZrN-(ZrCrNbAl)N on tool life of metal cutting tools at various cutting speeds (v c = 250, 300, 350 and 400 m·min −1 ). The paper investigates the basic mechanical parameters of coatings and the mechanism of coating failure in scratch testing depending on thickness of coating. Cutting tests were conducted in longitudinal turning of steel C45 with tools with the coatings under study of various thicknesses (3, 5, and 7 µm), with an uncoated tool and with a tool with a "reference" coating of TiAlN. The relationship of "cutting speed v c -tool life T" was built and investigated; and the mechanisms were found to determine the selection of the optimum coating thickness at various cutting speeds. Advantages of cutting tools with these coatings are especially obvious at high cutting speeds (in particular, v c = 400 m·min −1 ). If at lower cutting speeds, the longest tool life is shown by tools with thicker coatings (of about 7 µm), then with an increase in cutting speed (especially at v c = 400 m·min −1 ) the longest tool life is shown by tools with thinner coating (of about 3 µm).

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“…Especially, the HEA nitrides prepared by reactive-magnetron sputtering have been widely investigated as a new type of protective coating materials. Since the nitrogen content in the films has a strong influence on the structure and mechanical performance of the HEA nitrides, many studies reported that the HEA nitride films and coatings deposited under the different nitrogen flow ratios (R N ) by reactive sputtering, such as TiVCrAlZr [93], AlCrMoTaTiZr [42], AlCrNbSiTiV [43], AlCrTaTiZr [94], TiVCrZrHf [95], and AlCrMnMoNiZr [96].…”

Section: Hea Nitride Oxide and Carbide Films And Coatingsmentioning

confidence: 99%

Microstructures and properties of high-entropy alloy films and coatings: a review

Liu

Liaw

2018

Materials Research Letters

425

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In the past 14 years, as a branch of high-entropy alloy (HEA) materials, HEA films and coatings have exhibited the attractive and unique properties, relative to the conventional film and coating materials. The recent research and development of HEA films and coatings are reviewed in this paper. At first, the basic concept of HEAs films and coatings are introduced. Then, their preparation technologies, microstructures and appealing properties are summarized. Moreover, the possible reasons and design criteria for achieving the excellent properties are discussed. Finally, the suggested future research work for the HEA films and coatings are outlined. IMPACT STATEMENT Preparation technologies, microstructures, and properties of HEA films and coatings are reviewed in this paper. The design criteria and suggested research directions are further discussed and proposed.

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Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

Cited by 111 publications

References 25 publications

Nano-Crystallization of High-Entropy Amorphous NbTiAlSiWxNy Films Prepared by Magnetron Sputtering

Nano-Crystallization of High-Entropy Amorphous NbTiAlSiWxNy Films Prepared by Magnetron Sputtering

Influence of Thickness of Multilayered Nano-Structured Coatings Ti-TiN-(TiCrAl)N and Zr-ZrN-(ZrCrNbAl)N on Tool Life of Metal Cutting Tools at Various Cutting Speeds

Microstructures and properties of high-entropy alloy films and coatings: a review

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