2012
DOI: 10.1179/1743294412y.0000000066
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Structural and mechanical properties of nanostructured tungsten oxide thin films

Abstract: This study presents structural and mechanical properties of WO 3 thin films deposited on glass substrates at different temperatures by radio frequency reactive magnetron sputtering. WO 3 films deposited at temperatures up to 200uC are found as amorphous, but crystalline at 300 and 400uC. Chemical analysis reveals the overstoichiometry of the films. The diffusion of sodium ions from glass substrates occurs at higher temperatures. The adhesion critical loads of WO 3 films deposited at room temperature and at 200… Show more

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Cited by 24 publications
(18 citation statements)
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“…We found the obtainment of high mechanical strength material, in which the H and E values increase more than three times when heating at 800°C (Dc of about 40 nm). The present trend for the effect of heating temperature on the mechanical properties is in good agreement with previous studies (Hasan et al, 2012). Based on the above analysis, it is found that Dc has a more significant impact on the change of micromechanical structure.…”
Section: Resultssupporting
confidence: 92%
See 1 more Smart Citation
“…We found the obtainment of high mechanical strength material, in which the H and E values increase more than three times when heating at 800°C (Dc of about 40 nm). The present trend for the effect of heating temperature on the mechanical properties is in good agreement with previous studies (Hasan et al, 2012). Based on the above analysis, it is found that Dc has a more significant impact on the change of micromechanical structure.…”
Section: Resultssupporting
confidence: 92%
“…Thus, this information will be important to comprehend the best process condition when employing WO 3 materials. Until now, several papers have reported the mechanical properties of WO 3 (Abadias et al, 2006;Hasan et al, 2012;Maillé et al, 2005;Parreira et al, 2006). Most of the reports focused on the thin film, while reports on the WO 3 particles are disregarded.…”
Section: Introductionmentioning
confidence: 99%
“…The peaks were found to be shifted to lower q values and the intensity of the peaks was increased with the lithium content in the films. This may be due to a change in the symmetry of the hexagonal WO 3 to a higher order, possibly orthorhombic [19], and [20]. The lattice parameters are calculated from the above data and the value of "a" is relatively constant at 0.735 nm and "c" decreases from 0.382 nm to 0.375 nm, which represents a contraction of the lattice volume, because the Li + ions at interstitial positions attract the neighbouring O 2-ions in the lattice with increasing quantity of lithium in WO 3 films and which is consistent with the reported data [19], [20].…”
Section: Resultsmentioning
confidence: 99%
“…[1]. On the other hand, tungsten oxide has been used as an outstanding electrochromic material for smart-window applications, anti-glare rear view mirrors for automobiles and gas sensors owing to its excellent optical and electrochromic properties [2]. Now-a-days, research efforts have been focused to find a new optical and EC material with improved optical and electro-optical characteristics, which find applications in integrated optics such as optical modulation, optical information display, and optical data storage [3].…”
Section: Introductionmentioning
confidence: 99%