Structural and nanomechanical characterization of niobium films deposited by DC magnetron sputtering

Li, X.; Cao, Wenhui; Tao, Xingfu; Ren, Lingling; Zhou, Lingping; Xu, Gaohong

doi:10.1007/s00339-016-9990-1

Cited by 14 publications

(4 citation statements)

References 22 publications

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“…3(a). Similar elongated structures were observed for sputtered Nb films on glass substrates [40,41]. With increasing substrate temperature, the size of the elongated grains increased, as shown in Fig.…”

Section: Structural and Morphological Propertiessupporting

confidence: 81%

Fabrication of superconducting Nb3Sn film by Co-sputtering

Sayeed

Pudasaini

Eremeev

et al. 2023

Vacuum

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Section: Structural and Morphological Propertiessupporting

confidence: 81%

Fabrication of superconducting Nb3Sn film by Co-sputtering

Sayeed

Pudasaini

Eremeev

et al. 2023

Vacuum

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“…The additional peak, which is noted at ~35°, cannot be assigned due to bcc Nb but this peak matches and corresponds to (222) reflection of NbO 2 [ 47 ]. The presence of NbO 2 is, perhaps, due to surface oxidation that comes up as a resultant of high affinity of Nb towards oxygen and due to post deposition sample handling [ 25 ]. These naturally oxidized few monolayers were enough to passivate the surface and protect the bulk of the thin film from deeper oxidation.…”

Section: Resultsmentioning

confidence: 99%

“…Numerous investigations exist in the literature for Nb thin films made by variety of physical vapor deposition methods. Li et al [ 25 ] explored the effect of different deposition pressures on the microstructure and nano mechanical properties. The increasing deposition pressure increases grain size, thickness, roughness, and hardness while porosity seen to decrease continuously.…”

Section: Introductionmentioning

confidence: 99%

Correlation between Crystal Structure, Surface/Interface Microstructure, and Electrical Properties of Nanocrystalline Niobium Thin Films

et al. 2020

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Niobium (Nb) thin films, which are potentially useful for integration into electronics and optoelectronics, were made by radio-frequency magnetron sputtering by varying the substrate temperature. The deposition temperature (Ts) effect was systematically studied using a wide range, 25–700 °C, using Si(100) substrates for Nb deposition. The direct correlation between deposition temperature (Ts) and electrical properties, surface/interface microstructure, crystal structure, and morphology of Nb films is reported. The Nb films deposited at higher temperature exhibit a higher degree of crystallinity and electrical conductivity. The Nb films’ crystallite size varied from 5 to 9 (±1) nm and tensile strain occurs in Nb films as Ts increases. The surface/interface morphology of the deposited Nb films indicate the grain growth and dense, vertical columnar structure at elevated Ts. The surface roughness derived from measurements taken using atomic force microscopy reveal that all the Nb films are characteristically smooth with an average roughness <2 nm. The lowest electrical resistivity obtained was 48 µΩ cm. The correlations found here between growth conditions electrical properties as well as crystal structure, surface/interface morphology, and microstructure, could provide useful information for optimum conditions to produce Nb thin films for utilization in electronics and optoelectronics.

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“…However, this method is unsuitable for long-term healthcare monitoring. The conductive materials can be coated on the textile yarns by dip-coating [11,18,19], spray coating [20], chemical vapor deposition [21][22][23][24] and magnetron sputtering [25,26]. However, conductive materials easily fall off the fabric after washing, especially for the dip-coating method, due to the weak bonding effect [27].…”

Section: Introductionmentioning

confidence: 99%

Washable and flexible screen printed graphene electrode on textiles for wearable healthcare monitoring

Luo

et al. 2020

J. Phys. D: Appl. Phys.

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Electrocardiogram (ECG) is an essential route to monitor and prevent cardiovascular related disease. Conventional silver/silver chloride (Ag/AgCl) electrodes are not able to be used for long-term monitoring due to the drying of gel and skin irritation. Graphene has been investigated as a promising material for wearable health-monitoring electronics. Here, a graphene-coated textile electrode was developed for ECG monitoring. The graphene electrode was prepared by screen printing graphene ink on a pre-modified textile substrate. The electrical resistance of the graphene textile electrode can be controlled by increasing the printing passes. The ECG signals obtained by the graphene textile electrode showed comparable performance to the conventional Ag/AgCl electrode. The graphene textile electrode shows satisfactory washability, high flexibility and good tortuosity. The performance of the ECG signal shows negligible change over nine washing cycles and 2000 bending cycles. Overall, the screen-printed graphene textile electrode in this work presents an inexpensive fabrication platform solution for long-term healthcare monitoring in wearable electronics.

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Structural and nanomechanical characterization of niobium films deposited by DC magnetron sputtering

Cited by 14 publications

References 22 publications

Fabrication of superconducting Nb3Sn film by Co-sputtering

Fabrication of superconducting Nb3Sn film by Co-sputtering

Correlation between Crystal Structure, Surface/Interface Microstructure, and Electrical Properties of Nanocrystalline Niobium Thin Films

Washable and flexible screen printed graphene electrode on textiles for wearable healthcare monitoring

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