2018
DOI: 10.1016/j.jnoncrysol.2018.07.007
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Structural and optical properties of optimized amorphous GeTe films for memory applications

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Cited by 28 publications
(10 citation statements)
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“…The appearance of novel doublets with 4d 5/2 peaks at 43.6, 43.1 and 42.6 eV is ascribed to the formation of TeO 2 (10% of the total spectral area), TeO (15.5% of the total spectral area), and TeO x species (12.5% of the total spectral area). [ 28–30 ] Similar conclusions are obtained from analysis of the Te‐3d core level (Figure S6b, Supporting Information).…”
Section: Resultssupporting
confidence: 78%
“…The appearance of novel doublets with 4d 5/2 peaks at 43.6, 43.1 and 42.6 eV is ascribed to the formation of TeO 2 (10% of the total spectral area), TeO (15.5% of the total spectral area), and TeO x species (12.5% of the total spectral area). [ 28–30 ] Similar conclusions are obtained from analysis of the Te‐3d core level (Figure S6b, Supporting Information).…”
Section: Resultssupporting
confidence: 78%
“…The MS sample is not completely crystalline: it has 18% amorphous phase left. It was shown that the films obtained by magnetron sputtering crystallize at a higher temperature than in the case of PLD [10,30]. On the other hand, in the other two samples (PLD and MSPLD), a minor hexagonal GeSb 4 Te 4 is obtained, which can be regarded as a seed for the hcp-GST-225 formation at a higher annealing temperature [3].…”
Section: X-ray Diffractionmentioning
confidence: 95%
“…Phase change materials are known to exhibit deposition-dependent optical and structural properties, such as mass density, optical bandgap and refractive index [10]. GST-225 films have been successfully obtained through a wide variety of deposition techniques such as magnetron sputtering [11], pulsed laser deposition [12], atomic layer deposition [13], chemical vapor deposition [14], etc.…”
Section: Introductionmentioning
confidence: 99%
“…The real part of the dielectric function, ε 1 , is related to ε 2 by the Kramers–Kronig relation. The optical dielectric constant, ε ∞ , is the low energy-limit of ε 1 and can be computed as ε ∞ = ε 1 (0.05 eV) 66 . The electronic transitions are described by the resonance energy E 0 of bound electrons oscillations, the broadening parameter Γ representing the scattering time of the carriers and the amplitude A given by the number of carriers making these transitions.…”
Section: Methodsmentioning
confidence: 99%