2011
DOI: 10.14331/ijfps.2011.330018
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Structural and Optical Properties of SiOx/Au/SiOx Layer Films on the Effect of Rapid Thermal Annealing Process

Abstract: In this work, layered of silicon suboxide/gold/silicon suboxide (SiO x /Au/SiO x ) films were prepared by using hot-wire plasma enhanced chemical vapor deposition (HW-PECVD) system. The films prepared underwent rapid thermal annealing (RTA) process for time periods of 100s, 500s and 700s at temperature of 800 o C in vacuum. The effects of RTA on the structural and morphology from FE-SEM, Auger and XRD measurement of the films were studied. The surface plasmon resonance (SPR) effect exhibited by Au particles wa… Show more

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