Structural and opto-electronic properties of transparent conducting (222)-textured Zr-doped In2O3/ZnO bilayer films

Liang, Yuan‐Chang; Liu, Chi‐Chang; Kuo, Chin-Chiuan; Liang, Yung-Ching

doi:10.1016/j.jcrysgro.2008.05.053

Cited by 9 publications

(5 citation statements)

References 31 publications

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“…Thus, (002)-textured ZnO films can provide a suitable template for the growth of (222) oriented In 2 O 3 films. This finding is further confirmed by other research groups. − …”

Section: Discussionsupporting

confidence: 86%

Influence of ZnO-Based Sub-Layers on the Growth of Hydrogen Doped Indium Oxide

Erfurt

Heinemann

Schmidt

et al. 2018

ACS Appl. Energy Mater.

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Because of its high mobility, hydrogen-doped indium oxide (In 2 O 3 :H) has a high potential as front contact in thin film or Si heterojunction solar cells. Certain growth conditions are required to process high-mobility In 2 O 3 :H. In Cu(In,Ga)Se 2 (CIGS) devices, the growth of In 2 O 3 :H is influenced by the existing sublayers. Therefore, the intention of the present study is to investigate these influences on In 2 O 3 :H, deposited by pulsed direct current magnetron sputtering onto bare glass substrates or Zn(O,S) and ZnO layers, as they are commonly used in CIGS solar cells. The amorphous Zn(O,S) and the crystalline ZnO films were deposited by radio frequency sputtering onto planar glass as well as rough CIGS samples. On the basis of X-ray diffraction and transmission electron microscopy measurements, the structure of the as-grown In 2 O 3 :H films was evaluated. X-ray diffraction patterns show amorphous growth on glass and Zn(O,S) and a higher crystallinity of In 2 O 3 :H films grown on ZnO layers. The preferred orientation of In 2 O 3 :H films changes from ( 222) to ( 400) when grown on ZnO layers with small grains. A pronounced crystalline growth leads to a reduction in charge carrier density and electron mobility. This was found for crystalline grown In 2 O 3 :H on planar glass as well as on rough CIGS samples in combination with a ZnO layer. A post deposition thermal treatment leads to the crystallization of amorphous phases and reduces strain in crystalline grown films, increasing the electron mobility for all films. However, the electrical properties of the crystalline-grown In 2 O 3 :H films did not improve sufficiently.

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“…Thus, (002)-textured ZnO films can provide a suitable template for the growth of (222) oriented In 2 O 3 films. This finding is further confirmed by other research groups. − …”

Section: Discussionsupporting

confidence: 86%

Influence of ZnO-Based Sub-Layers on the Growth of Hydrogen Doped Indium Oxide

Erfurt

Heinemann

Schmidt

et al. 2018

ACS Appl. Energy Mater.

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show abstract

“…It is one of the technologically important oxide materials because of its versatile physical properties [1][2][3][4]. ZnO in thin film or nanostructured morphology is highly demanded for technological applications, especially for the use in various electronic and optoelectronic devices [5,6].…”

Section: Introductionmentioning

confidence: 99%

“…ZnO in thin film or nanostructured morphology is highly demanded for technological applications, especially for the use in various electronic and optoelectronic devices [5,6]. Many growth techniques have been adopted to prepare ZnO thin films and nanostructures, such as aqueous solution deposition [7,8], sol-gel process [9], molecular beam epitaxy [10], metal-organic vapor-phase epitaxy [6], and sputtering [2,4]. Among all methods, electrodeposition in aqueous solutions is a low cost method for preparation of large area thin films, in terms of its low-temperature process and arbitrary substrate shapes.…”

Section: Introductionmentioning

confidence: 99%

Structural and optical properties of electrodeposited ZnO thin films on conductive RuO2 oxides

Liang¹,

Tsai²,

Huang³

et al. 2011

Journal of Alloys and Compounds

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“…Previous studies report the electrical and optical properties of perovskite oxides on transparent single-crystal substrates [14,15]. Indium oxide, zinc oxide, and tin oxide are the most common optically transparent electronic conductors, and are widely used in optoelectronic devices [16,13]. However, transparent conducting oxides have different crystal structures and * Corresponding author.…”

Section: Introductionmentioning

confidence: 99%