2009
DOI: 10.1016/j.apsusc.2008.07.190
|View full text |Cite
|
Sign up to set email alerts
|

Structural and tribological properties of nitrogen doped amorphous carbon thin films synthesized by CFUBM sputtering method for protective coatings

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4

Citation Types

0
6
0

Year Published

2010
2010
2022
2022

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 15 publications
(6 citation statements)
references
References 18 publications
0
6
0
Order By: Relevance
“…Neuville [30] has reviewed that the conclusions on the material structure (various characterization results) should always be in agreement to each other and especially coherent with the hardness measurement. The hardness itself depends on chemical bonds [2,14,17,21,26,29] and atomic density within the films, especially when other types of atoms (contaminants, dopants such as O, N, B and metals) are incorporated in the carbon based films [31]. This interpretation can also support the phenomena that the hardness of CN x films increases in the case of cross-linking of graphitic planes by sp 3 bonded carbons, which is widely accepted in the literature [2,32].…”
Section: Chemical Composition Of Cn X Filmsmentioning
confidence: 52%
See 3 more Smart Citations
“…Neuville [30] has reviewed that the conclusions on the material structure (various characterization results) should always be in agreement to each other and especially coherent with the hardness measurement. The hardness itself depends on chemical bonds [2,14,17,21,26,29] and atomic density within the films, especially when other types of atoms (contaminants, dopants such as O, N, B and metals) are incorporated in the carbon based films [31]. This interpretation can also support the phenomena that the hardness of CN x films increases in the case of cross-linking of graphitic planes by sp 3 bonded carbons, which is widely accepted in the literature [2,32].…”
Section: Chemical Composition Of Cn X Filmsmentioning
confidence: 52%
“…This behavior is mainly due to the enhancement of implantation and re-sputtering of high energetic N ions in the carbon plasma. High energetic N ions lead to the partial defects related to the distortion of crosslinked sp 2 clusters into the C-networks and the increase of N Csp 2 content by thermal spike during the films growth (P3 in Table 3) [14,19]. (3) It seems that the concentration of oxygen in the CN x (N 2 ) and CN x (N + ) films (C3) increases with increasing the nitrogen content.…”
Section: Chemical Composition Of Cn X Filmsmentioning
confidence: 98%
See 2 more Smart Citations
“…All spectra can be fitted to 3 peaks using Gaussian-Lorentz function with 20% Gaussian fraction. The low energy peak (C1) located at approximately 284.6 ± 0.2 eV and the second peak (C2) at 285.5 to 286 eV are assigned to carbon bonds in a pure C environment (C-C and C═C) and the carbon coordinated nitrogen bonds (C-N, C═N, or C ≡ N), respectively 26,[33][34][35]. The high energy peak (C3) at 287.4 to 288.5 eV is attributed to carbon coordinated oxygen bonds (C-O or C═O).…”
mentioning
confidence: 99%