1996
DOI: 10.1016/0257-8972(95)02602-9
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Structural characterisation of B4C films deposited by laser-assisted CVD

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Cited by 51 publications
(38 citation statements)
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“…The relative amount of the carbon and boron precursors in the reactive atmosphere can be characterised by the parameter φ = ϕ CH4 /(ϕ CH4 + ϕ BCl3 ). In this study, φ took values between 0.15 and 0.29, which were optimised to achieve homogeneous deposits of B 4 C, as reported previously [8,9]. Thickness profiles were obtained by optical profilometry and the microstructure was examined by scanning electron microscopy (SEM).…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The relative amount of the carbon and boron precursors in the reactive atmosphere can be characterised by the parameter φ = ϕ CH4 /(ϕ CH4 + ϕ BCl3 ). In this study, φ took values between 0.15 and 0.29, which were optimised to achieve homogeneous deposits of B 4 C, as reported previously [8,9]. Thickness profiles were obtained by optical profilometry and the microstructure was examined by scanning electron microscopy (SEM).…”
Section: Methodsmentioning
confidence: 99%
“…The experimental apparatus used for the experiments was already described in reference [8]. The CO 2 laser was operated in cw TEM 00 mode at a wavelength of 10.6 µm and impinges the substrate surface at perpendicular incidence, with a diameter of 13 mm.…”
Section: Methodsmentioning
confidence: 99%
“…17)19) The rest two weak broad bands can be observed at 1353 and 1583 cm ¹1 . They correspond to the D and G peaks of residual graphitic carbon, 20) indicating little free carbon coexisted in the as-synthesized B 13 C 2 sample.…”
Section: Resultsmentioning
confidence: 99%
“…CF4, Ar, CO2 ) where they get ionized. Due to the bad oxidation resistance and poor electrical conductivity of elemental boron, the most stable compound of boron -10 B4C has been studied as the neutron converting thin layer for neutron detectors due to its excellent thermal stability and chemical resistance [16], as well as the better conductivity than elemental boron. The basic principle of the thin solid film based new generation neutron detectors is similar to 3 He gas detectors except that the used neutron converting material is a thin solid layer of 10 B4C (on a base material like Al) instead of 3 He gas.…”
Section: Neutron Detectorsmentioning
confidence: 99%