2011
DOI: 10.1088/0957-4484/22/29/295604
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Structural characterization of InAs quantum dot chains grown by molecular beam epitaxy on nanoimprint lithography patterned GaAs(100)

Abstract: We combine nanoimprint lithography and molecular beam epitaxy for the site-controlled growth of InAs quantum dot chains on GaAs(100) substrates. We study the influence of quantum dot growth temperature and regrowth buffer thickness on the formation of the quantum dot chains. In particular, we show that by carefully tuning the growth conditions we can achieve equal quantum dot densities and photoluminescence ground state peak wavelengths for quantum dot chains grown on patterns oriented along the [011], [01 ̄1]… Show more

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Cited by 15 publications
(12 citation statements)
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“…1a–d we show the AFM images of site-controlled surface QDs aligned in [010]-oriented grooves with periods of 200, 500, 1000, and 2000 nm, respectively. We used here in this experiment the [010] direction in order to circumvent any GaAs growth anisotropies we have observed previously [21]. We observe that nearly all the QDs have grown into the groove structures.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…1a–d we show the AFM images of site-controlled surface QDs aligned in [010]-oriented grooves with periods of 200, 500, 1000, and 2000 nm, respectively. We used here in this experiment the [010] direction in order to circumvent any GaAs growth anisotropies we have observed previously [21]. We observe that nearly all the QDs have grown into the groove structures.…”
Section: Resultsmentioning
confidence: 99%
“…QD chains create a bridge from zero- to one-dimensional nanostructures and show interesting optical [1719] and transport behaviors [20]. Previously, we could show that InAs QD chains grown onto groove-like patterns show different growing behaviors than their self-assembled counterparts, and thus their optical properties show differences [21]. These studies were focused on dense QD chains with a period of 200 nm and thus, we could mainly investigate the ensemble properties.…”
Section: Introductionmentioning
confidence: 99%
“…This gives rise to InAs accumulation on the groove sidewalls, which reduces QD density in the grooves. 18 The influences of the anisotropic In migration and facetted pattern make the situation different compared to InAs deposition on shallow pit patterns, where typically QD density and/or size are larger than on planar area due to the increase of nucleation rate arising from the local surface curvature. 22 TEM investigations were carried out using a Jeol JEM 3010 microscope operating at 300 kV, equipped with a GATAN slow-scan charge-coupled device camera.…”
Section: Methodsmentioning
confidence: 99%
“…One of the main problems is the growth condition of InAs/GaAs selfassembled QDs which strongly influence their size, shape, and the wetting layer structure. A number of investigations have been performed to probe the formation mechanisms of InAs QDs by atomic force microscopy (AFM) [4,5], scanning tunneling microscopy (STM) [6,7], or transmission electron microscopy (TEM) [8]. It is well known that the variation of shape and energy gap for self-assembled InAs QDs significantly depends on Arsenic to Indium flux ratios (V/III ratios) [9].…”
Section: Introductionmentioning
confidence: 99%