1999
DOI: 10.1557/jmr.1999.0388
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Structural characterization of laser ablated epitaxial (Ba0.5Sr0.5)TiO3 thin films on MgO(001) by synchrotron x-ray scattering

Abstract: Epitaxial (Ba 0.5 Sr 0.5 ) TiO 3 thin films of two different thickness (∼25 and ∼134 nm) on MgO(001) prepared by a pulsed laser deposition method were studied by synchrotron x-ray scattering measurements. The film grew initially with a cube-on-cube relationship, maintaining it during further growth. As the film grew, the surface of the film became significantly rougher, but the interface between the film and the substrate did not. In the early stage of growth, the film was highly strained in a tetragonal struc… Show more

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Cited by 15 publications
(8 citation statements)
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“…BST film can be produced using fairly simple equipment on a tight budget and in relatively short time [9][10][11]. In the film-producing process, there are a number of methods that could be used such as the metalorganic chemical vapor deposition (MOCVD) method [12][13][14], the chemical vapor deposition method [15], the sol-gel method [16][17][18][19], the atomic layer deposition (ALD) method [20], the pulsed laser ablation deposition (PLAD) method [21,22], rf sputtering [17,23,24], and chemical solution deposition (CSD) method [24][25][26][27][28][29][30][31]. The CSD method is superior as it can control the film stoichiometry with good quality, an easy procedure, and has a fairly affordable cost [32][33][34].…”
Section: Introductionmentioning
confidence: 99%
“…BST film can be produced using fairly simple equipment on a tight budget and in relatively short time [9][10][11]. In the film-producing process, there are a number of methods that could be used such as the metalorganic chemical vapor deposition (MOCVD) method [12][13][14], the chemical vapor deposition method [15], the sol-gel method [16][17][18][19], the atomic layer deposition (ALD) method [20], the pulsed laser ablation deposition (PLAD) method [21,22], rf sputtering [17,23,24], and chemical solution deposition (CSD) method [24][25][26][27][28][29][30][31]. The CSD method is superior as it can control the film stoichiometry with good quality, an easy procedure, and has a fairly affordable cost [32][33][34].…”
Section: Introductionmentioning
confidence: 99%
“…CSD method is one of the methods to create/develop thin films [2][3][4][5][6][7][8][9][10][11][12], which has advantages including the ability to control the film stoichiometry with good quality, easy procedure, require relatively low cost, and generate a good crystalline phase [13][14][15]. In addition, thin films can also be fabricated by other methods such as metal organic chemical vapor deposition (MOCVD) [16][17][18], chemical vapor deposition [19], sol-gel [20][21][22][23], atomic layer deposition (ALD) [24], metal organic decomposition (MOD) [25], pulsed laser ablation deposition (PLAD) [26,27], and RF sputtering [2,21,28].…”
Section: Introductionmentioning
confidence: 99%
“…BT and BST films can be formed by various methods, such as chemical solution deposition (CSD) [1,2,4], metal organic chemical vapor deposition (MOCVD) [5][6][7], rf sputtering [8][9][10][11][12][13] and Pulsed Laser Ablation Deposition (PLAD) [14]. CSD Method is of particular interest because of its good control of stoichiometry, ease of fabrication and low temperature synthesis.…”
Section: Introductionmentioning
confidence: 99%