A monocrystalline In 0.18 Ga 0.82 N film of ~275 nm in thickness grown on a GaN/Al 2 O 3 substrate was irradiated with 290 MeV 238 U 32+ ions to a fluence of 1.2×10 12 cm-2 at room temperature. The irradiated sample was characterized using helium ion microscopy (HIM), Rutherford backscattering spectrometry under ion-channeling conditions (RBS/C), and high-resolution x-ray diffraction (HRXRD). The irradiation leads to formation of ion tracks throughout the thin In 0.18 Ga 0.82 N film and the 3.0 µm thick GaN buffer layer. The mean diameter of the tracks in In 0.18 Ga 0.82 N is ~9 nm, as determined by HIM examination. Combination of the HIM and RBS/C data suggests that the In 0.18 Ga 0.82 N material in the track is likely to be highly disordered or fully amorphized. The irradiation induced lattice relaxation in In 0.18 Ga 0.82 N and a distribution of d-spacing of the (0002) planes in GaN with lattice expansion are observed by HRXRD.