“…The ALD-grown SnS thin film has an orthorhombic structure, as indicated by Raman peak at 159 cm –1 , and is expected to have in-plane 2D ferroelectricity (Figure b ) , but the out-of-plane piezoelectric response is not generally expected. Nevertheless, the out-of-plane piezoelectric coefficient, d 33 , can still be observed due to structural defects, interface roughness, atomic vacancies, and an incomplete phase transition. , To determine the optimal thickness of each layer, we have prepared the PENG with different layer thicknesses of 2.5, 5, 7.5, and 10 nm for both SnS 2 and SnS. With the prepared thin films, the piezoelectric output performance of each device was examined.…”