“…As an intrinsic n-type semiconductor having a hexagonal wurtzite structure with a wide direct band gap of 3.37 eV at room temperature (RT) [12], ZnO could realize a lower resistivity via impurity-doping, such as Group IIIA (e.g., B, Al, Ga and In) [2][3][4]13,14], IVA (e.g., Si, Ge and Sn) [15], IIIB (e.g., Sc and Y) [16,17], and IVB (e.g., Ti and Zr) [18,19] elements. Impurity-doped ZnO thin films have been prepared by various techniques, such as molecular beam epitaxy (MBE) [13], metalorganic chemical vapor deposition (MOCVD) [7], pulsed laser deposition (PLD) [20,21], magnetron sputtering [14,16,18], thermal evaporation [22], spray pyrolysis [23] and sol-gel processing [17]. Among the fabrication techniques, pulsed laser deposition provides several advantages for growing high-performance TCO films [20,21].…”