2008
DOI: 10.1016/j.tsf.2007.10.036
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Structural, electrical and optical properties of sputter-deposited Nb-doped TiO2 (TNO) polycrystalline films

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Cited by 75 publications
(46 citation statements)
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“…A barium sulphate film served as reflectance standard. As found from These results are in good agreement with literature data for TiO 2 :Nb films made by sputtering [10,11], whereas films on SrTiO 3 have yielded lower resistivities as mentioned in the Introduction.…”
Section: Optical and Electrical Propertiessupporting
confidence: 92%
See 1 more Smart Citation
“…A barium sulphate film served as reflectance standard. As found from These results are in good agreement with literature data for TiO 2 :Nb films made by sputtering [10,11], whereas films on SrTiO 3 have yielded lower resistivities as mentioned in the Introduction.…”
Section: Optical and Electrical Propertiessupporting
confidence: 92%
“…These films have been produced by pulsed laser deposition onto SrTiO 3 [3,4,5,6] and glass [7,8,9] as well as by sputtering onto SrTiO 3 [10] and glass [11]. Films of TiO 2 :Ta, made by pulsed laser deposition onto SrTiO 3 , exhibit similar properties [12].…”
Section: Introductionmentioning
confidence: 99%
“…[ 12,15 ] Typically, in order to achieve the highest electrical conduction upon deposition, TiO 2 -based thin fi lms require an annealing process in a reducing atmosphere (vacuum or H 2 -based atmosphere, commonly at temperatures between 500 and 600 °C) so as to induce crystallization to a pure anatase phase and thus increase the carrier mobility, without compromising the charge carrier density. [ 12,13,19 ] In this context, wileyonlinelibrary.com it is noteworthy that annealing processes in oxidizing atmospheres (e.g., air) result in highly insulating fi lms. [ 12 ] Although such a result is expected from defect chemistry considerations, the exact mechanisms underlying this process and involving different phenomena (crystallization, oxygen incorporation) are still debated especially in the case of donor-doped TiO 2 .…”
Section: Introductionmentioning
confidence: 99%
“…However, owing to the popularity of flat panel displays, there has been a sharp increase in demand for ITO, which could likely cause a shortage of indium. Although studies on alternative ITO materials are being conducted [26][27][28][29][30], there exist cost and performance issues in practical applications. Therefore, this study aims to fabricate an ITO-free inorganic EL device by using a comb-type electrode.…”
Section: Introductionmentioning
confidence: 99%