Here, we investigate stability of the diamane oxide films
and show
that various compositions can be realized depending on the precursors,
temperature, and pressure. We demonstrate that the commonly used oxygen
source in the H2O form requires pressures of GPa order
to fabricate the film, which is in full agreement with the experimental
data. We show that different types of functional groups can tailor
electronic properties of bilayer diamane. Finally, we study electronic
property dependence on the film thickness, elucidating its connection
with surface states.