2021
DOI: 10.3390/ma14164500
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Structural Insights of Electrical Aging in PZT Thin Films as Revealed by In Situ Biasing X-ray Diffraction

Abstract: Electrical aging in lead zirconate titanate (PbZrxTi1−xO3) thin films has been intensively studied from a macroscopic perspective. However, structural origins and consequences of such degradation are less documented. In this study, we have used synchrotron radiation to evaluate the behavior of ferroelectric domains by X-ray diffraction (XRD). The sample was loaded with an AC triangular bias waveform between ±10 V with a number of cycle varying from one up to 108. At each step of the aging procedure, XRD spectr… Show more

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Cited by 2 publications
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“…However, the online version of record will be different from this version once it has been copyedited and typeset. The piezoelectric properties of ferroelectric thin films are studied by various methods, including piezoresponse force microscopy (PFM), interferometry [18], and in situ and time-resolved X-ray diffraction (XRD) during the application of an electric field [19,20,21,22,23,24,25,26,27]. While PFM is a local probe and prone to surface artifacts, XRD provides access to the piezoelectrically-induced strain within the complete thickness of the thin film and on a large lateral scale with a strain resolution of 10 -…”
Section: Introductionmentioning
confidence: 99%
“…However, the online version of record will be different from this version once it has been copyedited and typeset. The piezoelectric properties of ferroelectric thin films are studied by various methods, including piezoresponse force microscopy (PFM), interferometry [18], and in situ and time-resolved X-ray diffraction (XRD) during the application of an electric field [19,20,21,22,23,24,25,26,27]. While PFM is a local probe and prone to surface artifacts, XRD provides access to the piezoelectrically-induced strain within the complete thickness of the thin film and on a large lateral scale with a strain resolution of 10 -…”
Section: Introductionmentioning
confidence: 99%