Paper péÉÅá~ä fëëìÉ Äó dìÉëí bÇáíçêëW lêÖ~åáÅ-íç-fåçêÖ~åáÅ`çåîÉêëáçå mêçÅÉëë Ñçê mçäóãÉê-aÉêáîÉÇ`Éê~ãáÅë içï qÉãéÉê~íìêÉ`êóëí~ääáò~íáçå _ÉÜ~îáçê çÑ apá P k Q Ñêçã qáaçéÉÇ ãçêéÜçìë páäáÅçå káíêáÇÉ aÉêáîÉÇ Ñêçã mçäóíáí~å~ëáä~ò~åÉë Si MAS NMR spectroscopic analyses revealed that, during the polymerceramics conversion process, the dehydrogenation reactions of the PHPS were apparently accelerated by the small amount of Ti-doping using TiNCH 3 2 4 . This could lead to enhancing the lower temperature formation of SiN 4 tetrahedral units necessary for the crystallization of a-Si 3 N 4 at 1273 K.