2009
DOI: 10.1007/s00542-009-0882-6
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Structural modelling and integrative analysis of microelectromechanical systems product using graph theoretic approach

Abstract: Micro-electromechanical systems (MEMS) as an enabling technology is seen to play a more and more important role for the main stream of industry of the future by broadening its applications to information, communications and bio technologies. Development of MEMS devices, however, still relies on knowledge and experience of MEMS experts due to the design and fabrication process complexity. It is difficult to understand the trade-offs inherent in the system and achieve an optimal structure without any MEMS-relate… Show more

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Cited by 4 publications
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References 34 publications
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