In the present study, molybdenum doped chromium nitride coatings deposited onto silicon substrates via unbalanced magnetron sputtering, in as-deposited and annealed conditions, at 500 -800 C in steps of 100 C, were studied to reveal their temperature dependent structural, morphological, optical and mechanical behaviors.An analysis of these features was carried out using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), ultraviolet visible (UV-Vis)