2016 International Conference on Nanomaterials: Application &Amp; Properties (NAP) 2016
DOI: 10.1109/nap.2016.7757255
|View full text |Cite
|
Sign up to set email alerts
|

Structural-phase state and electrophysical properties of Ru thin films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
2
0
1

Year Published

2020
2020
2022
2022

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(3 citation statements)
references
References 12 publications
0
2
0
1
Order By: Relevance
“…The detail analysis of crystal structure of thin-film systems based on Co and Ru and pure Ru thin films were performed in Ref. [25,26]. It was demonstrated that the diffraction patterns from Co/Ru/Co/Sub three-layer film systems in as-deposited state consist of a combination of a two hexagonal close-packed (hcp) crystal structures with lattice constants a = 0.270 nm, c = 0.429 nm (hcp-Ru), and a = 0.251 nm, с = 0.407 nm (hcp-Co).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The detail analysis of crystal structure of thin-film systems based on Co and Ru and pure Ru thin films were performed in Ref. [25,26]. It was demonstrated that the diffraction patterns from Co/Ru/Co/Sub three-layer film systems in as-deposited state consist of a combination of a two hexagonal close-packed (hcp) crystal structures with lattice constants a = 0.270 nm, c = 0.429 nm (hcp-Ru), and a = 0.251 nm, с = 0.407 nm (hcp-Co).…”
Section: Resultsmentioning
confidence: 99%
“…The deposition rate was 1.0 nm/s. At such condensation conditions, all samples have nanocrystalline structure and do not contain impurities phases like oxides or carbides [25,26].…”
Section: Methodsmentioning
confidence: 99%
“…Як було показано нами раніше [12], структура одношарових тонких плівок Ru залежить від їхньої товщини та температури підкладин- вання на аморфній вуглецевій плівці. Також необхідно відмітити, що у всіх розглянутих тришарових плівкових системах фазовий стан і кристалічна структура зразків залишалися незмінними при повторних циклах нагрівання й охолодження в інтервалі 300-600 К. Отже, процес температурного оброблення не впливає істотно на фазовий склад.…”
Section: експериментальні результати та їх обговоренняunclassified